公开(公告)号：US09528824B2

公开(公告)日：2016-12-27

申请号：US14674397

申请日：2015-03-31

Applicant: MITUTOYO CORPORATION

Inventor： Edwin Bos ,  Ernst Treffers ,  Kazuhiko Hidaka

IPC: G01B5/012 ,  G01B21/04 ,  G01B7/00 ,  G01B7/012

CPC classification number: G01B21/04 ,  G01B7/001 ,  G01B7/012

Abstract: A contact probe includes a stylus, a sensor, and two parallel substantially planar plates. The stylus has a contact. The sensor has a substantially planar shape and includes a fixed portion, at least three thin-walled portions each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable portion to which the stylus is mounted and linked to the fixed portion via the thin-walled portions in at least three locations. The two parallel substantially planar plates are connected to the fixed portion on opposing sides and sandwich the movable portion so as to maintain a predetermined distance between the movable portion and the two parallel substantially planar plates and limit movement of the movable portion to a movable range. The sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus.

Abstract translation: 接触探针包括触针，传感器和两个平行的大致平面的平板。 触针有一个接触。 该传感器具有基本上平面形状并且包括固定部分，至少三个薄壁部分，每个薄壁部分由平板形成并且具有气溶沉积在其上的应变传感器，以及可移动部分，触针安装到该可移动部分并与其连接 在至少三个位置经由薄壁部分固定部分。 两个平行的基本平坦的板连接到相对侧上的固定部分并且夹持可动部分，以便在可移动部分和两个平行的基本上平坦的板之间保持预定距离，并限制可动部分移动到可移动范围。 传感器由于应变传感器响应于来自触针的测量力而变形而输出接触信号。