公开(公告)号：US20160027194A1

公开(公告)日：2016-01-28

申请号：US14808230

申请日：2015-07-24

Applicant: MITUTOYO CORPORATION

Inventor： Adriaan Tiemen ZUIDERWEG ,  Johannes Anna QUAEDACKERS ,  Harm VISSCHER

IPC: G06T11/20 ,  G01B11/00 ,  G01B11/22

CPC classification number: G06T11/206 ,  G01B11/2441 ,  G01B11/245 ,  G01B2210/52

Abstract: Method for measuring a height map of a test, including measuring a coarse height map of the test surface with a pre-map sensor provided to an optical profiler with a relatively long working distance and/or a large field of view, storing the coarse height map in a memory, subdividing the coarse height map into sections appropriate for the field of view of a high resolution optical profiler sensor provided to the optical profiler, calculating corresponding X, Y and Z positions for the optical profiler sensor with respect to the test surface, calculating a trajectory in the X, Y, Z-direction for the optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions, moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory, and measuring a high accuracy height map with the high resolution optical profiler sensor.

Abstract translation: 用于测量测试的高度图的方法，包括使用提供给具有相对长的工作距离和/或大视野的光学轮廓仪的预先映射传感器测量测试表面的粗略高度图，存储粗糙高度 映射到存储器中，将粗略的高度图划分成适合于提供给光学轮廓仪的高分辨率光学轮廓仪传感器的视野的部分，计算光学轮廓传感器相对于测试表面的相应的X，Y和Z位置 使用计算出的X，Y，Z位置，计算光学轮廓传感器相对于测试面的X，Y，Z方向的轨迹，将光学轮廓仪沿X，Y，Z方向移动， 根据轨迹到测试表面，并用高分辨率光学轮廓仪传感器测量高精度高度图。