公开(公告)号：US10781856B2

公开(公告)日：2020-09-22

申请号：US16028831

申请日：2018-07-06

Applicant: MITUTOYO CORPORATION

Inventor： Seiichi Otsubo ,  Kenji Ueda

IPC: F16C32/06 ,  G01B5/008 ,  G01B5/00 ,  F16C29/02

Abstract: The present invention relates to improving precision in a gate-type moving device. The gate-type moving device includes: a base, a gate-type moving body that is placed on the base via an air layer and moves on the base in a non-contact state, and an air bearing that forms the air layer, wherein the gate-type moving body is comprised of two leg parts that stand on an upper surface of the base, a beam portion that connects the leg parts, and a beam-direction moving body that moves along the beam portion, the air bearing is provided at a rear surface of at least one of the leg parts, and comprises an air blowout port that opens toward an upper surface of the base and an air suction port that opens toward the upper surface of the base, and the air suction port sucks air around the air suction port.

公开(公告)号：US10288402B2

公开(公告)日：2019-05-14

申请号：US15622509

申请日：2017-06-14

Applicant: MITUTOYO CORPORATION

Inventor： Seiichi Otsubo

IPC: G01B5/008 ,  G01B11/16 ,  G01B5/00

Abstract: A coordinate measurement machine includes a column that can move relative to a placement surface on which a workpiece is placed, a guide part that is provided on the placement surface, the guide part guiding the column, a scale of a linear encoder that is supported on a side surface of the guide part, and detectors that are provided on the column, the detectors detecting a relative displacement with respect to the scale. The detectors detect a displacement of the column in each of a moving direction and a vertical direction. A coordinate measurement machine further includes a deformation amount acquisition part that acquires an amount of deformation of the guide part relative to the scale on the basis of detection results of the detectors.