公开(公告)号：US20220138976A1

公开(公告)日：2022-05-05

申请号：US17085700

申请日：2020-10-30

Applicant: Mitutoyo Corporation

Inventor： Shannon Roy Campbell ,  Lukasz Redlarski

IPC: G06T7/571 ,  H04N5/225 ,  G06T7/521 ,  H04N5/232 ,  G01B11/25 ,  G02B21/02

Abstract: A metrology system is provided including a projected pattern for points-from-focus type processes. The metrology system includes an objective lens portion, a light source, a pattern projection portion and a camera. Different lenses (e.g., objective lenses) having different magnifications and cutoff frequencies may be utilized in the system. The pattern projection portion includes a pattern component with a pattern. At least a majority of the area of the pattern includes pattern portions that are not recurring at regular intervals across the pattern (e.g., as corresponding to a diverse spectrum of spatial frequencies that result in a relatively flat power spectrum over a desired range and with which different lenses with different cutoff frequencies may be utilized). The pattern is projected on a workpiece surface (e.g., for producing contrast) and an image stack is acquired, from which focus curve data is determined that indicates 3 dimensional positions of workpiece surface points.

公开(公告)号：US11587246B2

公开(公告)日：2023-02-21

申请号：US17085700

申请日：2020-10-30

Applicant: Mitutoyo Corporation

Inventor： Shannon Roy Campbell ,  Lukasz Redlarski

IPC: G06T7/571 ,  H04N5/225 ,  G06T7/521 ,  H04N5/232 ,  G01B11/25 ,  G02B21/02

Abstract: A metrology system is provided including a projected pattern for points-from-focus type processes. The metrology system includes an objective lens portion, a light source, a pattern projection portion and a camera. Different lenses (e.g., objective lenses) having different magnifications and cutoff frequencies may be utilized in the system. The pattern projection portion includes a pattern component with a pattern. At least a majority of the area of the pattern includes pattern portions that are not recurring at regular intervals across the pattern (e.g., as corresponding to a diverse spectrum of spatial frequencies that result in a relatively flat power spectrum over a desired range and with which different lenses with different cutoff frequencies may be utilized). The pattern is projected on a workpiece surface (e.g., for producing contrast) and an image stack is acquired, from which focus curve data is determined that indicates 3 dimensional positions of workpiece surface points.

公开(公告)号：US20210390681A1

公开(公告)日：2021-12-16

申请号：US16902181

申请日：2020-06-15

Applicant: Mitutoyo Corporation

Inventor： William Todd Watson ,  Robert Kamil Bryll ,  Shannon Roy Campbell

IPC: G06T7/00

Abstract: A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects. Anomaly detector classification characteristics are determined based on features of the training images. Run mode images of workpieces are acquired with the camera, and based on determined features from the images, the anomaly detector classification characteristics are utilized to determine if the images of the workpieces are classified as anomalous. In addition, the defect detection portion determines if images are defect images that include workpieces with defects and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)

公开(公告)号：US09060117B2

公开(公告)日：2015-06-16

申请号：US13725992

申请日：2012-12-21

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll ,  Shannon Roy Campbell

IPC: H04N5/232

CPC classification number: H04N5/235 ,  H04N5/23212

Abstract: A method of automatically adjusting lighting conditions improves the results of points from focus (PFF) 3D reconstruction. Multiple lighting levels are automatically found based on brightness criteria and an image stack is taken at each lighting level. In some embodiments, the number of light levels and their respective light settings may be determined based on trial exposure images acquired at a single global focus height which is a best height for an entire region of interest, rather than the best focus height for just the darkest or brightest image pixels in a region of interest. The results of 3D reconstruction at each selected light level are combined using a Z-height quality metric. In one embodiment, the PFF data point Z-height value that is to be associated with an X-Y location is selected based on that PFF data point having the best corresponding Z-height quality metric value at that X-Y location.

Abstract translation: 自动调整照明条件的方法改善了聚焦点（PFF）3D重建的结果。 根据亮度标准自动找到多个照明级别，并在每个照明级别拍摄图像堆叠。 在一些实施例中，可以基于在单个全球焦点高度获取的试验曝光图像来确定光级数及其相应的光设置，该全景焦点高度是整个感兴趣区域的最佳高度，而不是仅针对 感兴趣区域中最暗或最亮的图像像素。 使用Z高度质量度量来组合每个选择的光级处的3D重建的结果。 在一个实施例中，基于在该X-Y位置处具有最佳对应Z高度质量度量值的PFF数据点来选择与X-Y位置相关联的PFF数据点Z高度值。

公开(公告)号：US11150200B1

公开(公告)日：2021-10-19

申请号：US16902182

申请日：2020-06-15

Applicant: Mitutoyo Corporation

Inventor： William Todd Watson ,  Shannon Roy Campbell ,  Robert Kamil Bryll

IPC: H04N17/00 ,  G01N21/956 ,  G01N21/88 ,  G06T7/00

Abstract: A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects, and determines a performance of the defect detection portion as trained with the training images. Based on the performance of the defect detection portion, an indication is provided as to whether additional defect images should be provided for training. After training is complete, the camera is utilized to acquire new images of workpieces which are analyzed to determine defect images that include workpieces with defects, and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)

公开(公告)号：US20130162807A1

公开(公告)日：2013-06-27

申请号：US13725992

申请日：2012-12-21

Applicant: MITUTOYO CORPORATION

Inventor： Robert Kamil Bryll ,  Shannon Roy Campbell

IPC: H04N5/235

CPC classification number: H04N5/235 ,  H04N5/23212

Abstract: A method of automatically adjusting lighting conditions improves the results of points from focus (PFF) 3D reconstruction. Multiple lighting levels are automatically found based on brightness criteria and an image stack is taken at each lighting level. In some embodiments, the number of light levels and their respective light settings may be determined based on trial exposure images acquired at a single global focus height which is a best height for an entire region of interest, rather than the best focus height for just the darkest or brightest image pixels in a region of interest. The results of 3D reconstruction at each selected light level are combined using a Z-height quality metric. In one embodiment, the PFF data point Z-height value that is to be associated with an X-Y location is selected based on that PFF data point having the best corresponding Z-height quality metric value at that X-Y location.

Abstract translation: 自动调整照明条件的方法改善了聚焦点（PFF）3D重建的结果。 根据亮度标准自动找到多个照明级别，并在每个照明级别拍摄图像堆叠。 在一些实施例中，可以基于在单个全球焦点高度获取的试验曝光图像来确定光级数及其相应的光设置，该全景焦点高度是整个感兴趣区域的最佳高度，而不是仅针对 感兴趣区域中最暗或最亮的图像像素。 使用Z高度质量度量来组合每个选择的光级处的3D重建的结果。 在一个实施例中，基于在该X-Y位置处具有最佳对应Z高度质量度量值的PFF数据点来选择与X-Y位置相关联的PFF数据点Z高度值。

公开(公告)号：US11430105B2

公开(公告)日：2022-08-30

申请号：US16902181

申请日：2020-06-15

Applicant: Mitutoyo Corporation

Inventor： William Todd Watson ,  Robert Kamil Bryll ,  Shannon Roy Campbell

IPC: G06T7/00

Abstract: A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects. Anomaly detector classification characteristics are determined based on features of the training images. Run mode images of workpieces are acquired with the camera, and based on determined features from the images, the anomaly detector classification characteristics are utilized to determine if the images of the workpieces are classified as anomalous. In addition, the defect detection portion determines if images are defect images that include workpieces with defects and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)