Variable focal length lens system with multi-level extended depth of field image processing

    公开(公告)号:US10101572B2

    公开(公告)日:2018-10-16

    申请号:US15360579

    申请日:2016-11-23

    Abstract: An imaging system including a tunable acoustic gradient (TAG) lens is associated with a user interface including a live display of an extended depth of field (EDOF) image. The TAG lens is utilized to produce a raw EDOF image, which may include defocus blur (e.g., resulting in part from the periodically modulated optical power variation of the TAG lens). The live EDOF image is repetitively updated in the user interface based on a translation state signal at a current time (e.g., indicating a speed of translation of the workpiece across a field of view of the imaging system, etc.) In response to a current state of the translation state signal, a corresponding type of live EDOF image of the workpiece is displayed in the user interface corresponding to an EDOF image data set that is based on a corresponding level of image processing to remove defocus blur.

    VARIABLE FOCAL LENGTH IMAGING SYSTEM

    公开(公告)号:US20170318216A1

    公开(公告)日:2017-11-02

    申请号:US15144291

    申请日:2016-05-02

    Abstract: A variable focal length (VFL) imaging system comprises a camera system, a first high speed variable focal length (VFL) lens, a second high speed variable focal length (VFL) lens, a first relay lens comprising a first relay focal length, a second relay lens comprising a second relay focal length, and a lens controller. The first relay lens and the second relay lens are spaced relative to one another along an optical axis of the VFL imaging system by a distance which is equal to a sum of the first relay focal length and the second relay focal length. The first high speed VFL lens and the second high speed VFL lens are spaced relative to one another along the optical axis on opposite sides of an intermediate plane which is located at a distance equal to the first relay focal length from the first relay lens. The lens controller is configured to provide synchronized periodic modulation of the optical power of the first high speed VFL lens and the optical power of the second high speed VFL lens.

    MULTI-LEVEL IMAGE FOCUS USING A TUNABLE LENS IN A MACHINE VISION INSPECTION SYSTEM
    5.
    发明申请
    MULTI-LEVEL IMAGE FOCUS USING A TUNABLE LENS IN A MACHINE VISION INSPECTION SYSTEM 有权
    在机器视觉检测系统中使用可调节镜头的多级图像聚焦

    公开(公告)号:US20170061601A1

    公开(公告)日:2017-03-02

    申请号:US14841051

    申请日:2015-08-31

    Abstract: A method is provided for defining operations for acquiring a multi-exposure image of a workpiece including first and second regions of interest at different Z heights. The multi-exposure image is acquired by a machine vision inspection system including strobed illumination and a variable focal length lens (e.g., a tunable acoustic gradient index of refraction lens) used for periodically modulating a focus position. During a learn mode, first and second multi-exposure timing values for instances of strobed illumination are determined that correspond with first and second phase timings of the periodically modulated focus position that produce sufficient image focus for the first and second regions of interest. Data indicative of the multi-exposure timing difference is recorded and is subsequently utilized (e.g., during a run mode) to define operations for acquiring a multi-exposure image of first and second regions of interest on a current workpiece that is similar to the representative workpiece.

    Abstract translation: 提供了一种用于定义用于获取包括在不同Z高度处的第一和第二感兴趣区域的工件的多曝光图像的操作的方法。 多曝光图像通过包括选通照明的机器视觉检查系统和用于周期性地调制聚焦位置的可变焦距透镜(例如,可调节的声学倾斜折射率折射率)来获取。 在学习模式期间,确定用于选通照明的实例的第一和第二多曝光定时值,其对应于为感兴趣的第一和第二区域产生足够的图像焦点的周期性调制的焦点位置的第一和第二相位定时。 记录表示多曝光定时差的数据,并随后被利用(例如,在运行模式期间)来定义用于获取当前工件上的第一和第二感兴趣区域的多曝光图像的操作,其类似于代表 工件。

    Workpiece inspection and defect detection system including monitoring of workpiece images

    公开(公告)号:US11430105B2

    公开(公告)日:2022-08-30

    申请号:US16902181

    申请日:2020-06-15

    Abstract: A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects. Anomaly detector classification characteristics are determined based on features of the training images. Run mode images of workpieces are acquired with the camera, and based on determined features from the images, the anomaly detector classification characteristics are utilized to determine if the images of the workpieces are classified as anomalous. In addition, the defect detection portion determines if images are defect images that include workpieces with defects and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)

    Variable focal length imaging system

    公开(公告)号:US09930243B2

    公开(公告)日:2018-03-27

    申请号:US15144291

    申请日:2016-05-02

    Abstract: A variable focal length (VFL) imaging system comprises a camera system, a first high speed variable focal length (VFL) lens, a second high speed variable focal length (VFL) lens, a first relay lens comprising a first relay focal length, a second relay lens comprising a second relay focal length, and a lens controller. The first relay lens and the second relay lens are spaced relative to one another along an optical axis of the VFL imaging system by a distance which is equal to a sum of the first relay focal length and the second relay focal length. The first high speed VFL lens and the second high speed VFL lens are spaced relative to one another along the optical axis on opposite sides of an intermediate plane which is located at a distance equal to the first relay focal length from the first relay lens. The lens controller is configured to provide synchronized periodic modulation of the optical power of the first high speed VFL lens and the optical power of the second high speed VFL lens.

    Phase difference calibration in a variable focal length lens system

    公开(公告)号:US09736355B1

    公开(公告)日:2017-08-15

    申请号:US15145682

    申请日:2016-05-03

    CPC classification number: H04N5/23212 G02B7/04 G02F2001/294

    Abstract: A variable focal length (VFL) lens system is utilized to determine surface Z-height measurements of imaged surfaces. A controller of the system is configured to control a VFL lens (e.g., a tunable acoustic gradient index of refraction lens) to periodically modulate its optical power and thereby periodically modulate a focus position at a first operating frequency, wherein the periodically modulated VFL lens optical power defines a first periodic modulation phase. A phase timing signal is synchronized with a periodic signal in the controller that has the first operating frequency and that has a second periodic modulation phase that has a phase offset relative to the first periodic modulation phase. A phase offset compensating portion is configured to perform a phase offset compensating process that provides Z-height measurements, wherein at least one of Z-height errors or Z-height variations that are related to a phase offset contribution are at least partially eliminated.

    Machine vision inspection system and method for obtaining an image with an extended depth of field

    公开(公告)号:US09726876B2

    公开(公告)日:2017-08-08

    申请号:US14092862

    申请日:2013-11-27

    CPC classification number: G02B21/367 G02B21/241 G02B21/361 G02B27/0075

    Abstract: A method for operating an imaging system of a machine vision inspection system to provide an extended depth of field (EDOF) image. The method comprises (a) placing a workpiece in a field of view; (b) periodically modulating a focus position of the imaging system without macroscopically adjusting the spacing between elements in the imaging system, the focus position is periodically modulated over a plurality of positions along a focus axis direction in a focus range including a workpiece surface height; (c) exposing a first preliminary image during an image integration time while modulating the focus position in the focus range; and (d) processing the first preliminary image to remove blurred image contributions occurring in the focus range during the image integration time to provide an EDOF image that is focused throughout a larger depth of field than the imaging system provides at a single focal position.

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