公开(公告)号：US10782200B2

公开(公告)日：2020-09-22

申请号：US16019832

申请日：2018-06-27

Applicant: MKS Instruments, Inc.

Inventor： Orry Shamash ,  Alan Ludwiszewski ,  Clinton Percy ,  Boris Mandadzhiev

IPC: G01L19/06 ,  G01L19/14 ,  C04B111/28

Abstract: A high-temperature pressure sensor includes a pressure sensor device and a heater shell body external to the pressure sensor device for providing heat to the pressure sensor device. A particle-generating insulation material is encapsulated within an encapsulation material to form an encapsulated insulation structure comprising the particle-generating insulation material within the encapsulation material, such that the encapsulation material substantially contains particles generated by the particle-generating insulation material within encapsulated insulation structure. The encapsulated insulation structure is disposed adjacent to an exterior of the heater shell body.

公开(公告)号：US20200003650A1

公开(公告)日：2020-01-02

申请号：US16019832

申请日：2018-06-27

Applicant: MKS Instruments, Inc.

Inventor： Orry Shamash ,  Alan Ludwiszewski ,  Clinton L. Percy ,  Boris Mandadzhiev

IPC: G01L19/06 ,  G01L19/14

Abstract: A high-temperature pressure sensor includes a pressure sensor device and a heater shell body external to the pressure sensor device for providing heat to the pressure sensor device. A particle-generating insulation material is encapsulated within an encapsulation material to form an encapsulated insulation structure comprising the particle-generating insulation material within the encapsulation material, such that the encapsulation material substantially contains particles generated by the particle-generating insulation material within encapsulated insulation structure. The encapsulated insulation structure is disposed adjacent to an exterior of the heater shell body.