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    COLD CATHODE IONIZATION VACUUM GAUGE WITH MULTIPLE CATHODES
    2.
    发明申请
    COLD CATHODE IONIZATION VACUUM GAUGE WITH MULTIPLE CATHODES 审中-公开

    公开(公告)号：US20170315012A1

    公开(公告)日：2017-11-02

    申请号：US15499064

    申请日：2017-04-27

    Applicant: MKS Instruments, Inc.

    Inventor： Timothy C. Swinney ,  Clinton L. Percy ,  Duane W. Marion ,  Brandon J. Kelly

    IPC: G01L21/34

    CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J41/06

    Abstract: A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger spacing may provide current based on Townsend discharge; whereas, a second cathode having a smaller spacing may provide current based on both Townsend discharge at higher pressures and on Paschen's Law discharge at still higher pressures. A feature on the second cathode may support Paschen's Law discharge. Large resistances between the cathodes and a return to power supply enable control of output profiles to extend the pressure ranges with accurate responses and avoid output minima. Pressure measurements may be made based on currents from respective cathodes dependent on the outputs of the cathodes through the wide pressure range of measurement. The multiple cathodes may also provide measurements that avoid the discontinuities found in current outputs of the respective cathodes.

    Gas analysis with an inverted magnetron source
    5.
    发明授权
    Gas analysis with an inverted magnetron source 有权

    公开(公告)号：US10928265B2

    公开(公告)日：2021-02-23

    申请号：US16397436

    申请日：2019-04-29

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Clinton L. Percy

    IPC: G01L21/34 ,  H01J41/06

    Abstract: A total pressure cold cathode ionization gauge is disclosed. An inverted magnetron electrode design is capable of simultaneously detecting and measuring total gas pressure in a high vacuum system, along with partial pressures of one or more gases, such as hydrogen, helium and water. In addition, a leak detector, such as a helium leak detector, is disclosed with a compact counterflow arrangement of a gas inlet passage to an ion detection passage.

    Gas analyzer system with ion source
    7.
    发明授权
    Gas analyzer system with ion source 有权

    公开(公告)号：US10948456B1

    公开(公告)日：2021-03-16

    申请号：US16698178

    申请日：2019-11-27

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Clinton L. Percy

    IPC: H01J49/00 ,  G01N27/622 ,  H01J37/317

    Abstract: A gas analyzer system uses an ionization source, which can be a hot cathode ionization source. A magnet assembly is positioned to define a magnetic field, which permits separation of ion components based on their mass to charge ratio. An ion beam deflector is used, such as a pair of deflector plates, which can scan ion components across a detector. The ion beam deflector defines a deflection electric field across the magnetic field and across a direction of travel of the ions emitted from the ionization source.

    Apparatus and Method for Thermal Insulation of High-Temperature Pressure Sensors
    8.
    发明申请
    Apparatus and Method for Thermal Insulation of High-Temperature Pressure Sensors 审中-公开

    公开(公告)号：US20200003650A1

    公开(公告)日：2020-01-02

    申请号：US16019832

    申请日：2018-06-27

    Applicant: MKS Instruments, Inc.

    Inventor： Orry Shamash ,  Alan Ludwiszewski ,  Clinton L. Percy ,  Boris Mandadzhiev

    IPC: G01L19/06 ,  G01L19/14

    Abstract: A high-temperature pressure sensor includes a pressure sensor device and a heater shell body external to the pressure sensor device for providing heat to the pressure sensor device. A particle-generating insulation material is encapsulated within an encapsulation material to form an encapsulated insulation structure comprising the particle-generating insulation material within the encapsulation material, such that the encapsulation material substantially contains particles generated by the particle-generating insulation material within encapsulated insulation structure. The encapsulated insulation structure is disposed adjacent to an exterior of the heater shell body.

    Cold cathode ionization vacuum gauge with multiple cathodes
    10.
    发明授权
    Cold cathode ionization vacuum gauge with multiple cathodes 有权

    公开(公告)号：US10337940B2

    公开(公告)日：2019-07-02

    申请号：US15499064

    申请日：2017-04-27

    Applicant: MKS Instruments, Inc.

    Inventor： Timothy C. Swinney ,  Clinton L. Percy ,  Duane W. Marion ,  Brandon J. Kelly

    IPC: G01L21/34 ,  H01J41/06 ,  G01L21/32 ,  G01L21/30

    Abstract: A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger spacing may provide current based on Townsend discharge; whereas, a second cathode having a smaller spacing may provide current based on both Townsend discharge at higher pressures and on Paschen's Law discharge at still higher pressures. A feature on the second cathode may support Paschen's Law discharge. Large resistances between the cathodes and a return to power supply enable control of output profiles to extend the pressure ranges with accurate responses and avoid output minima. Pressure measurements may be made based on currents from respective cathodes dependent on the outputs of the cathodes through the wide pressure range of measurement. The multiple cathodes may also provide measurements that avoid the discontinuities found in current outputs of the respective cathodes.

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