公开(公告)号：US20220214321A1

公开(公告)日：2022-07-07

申请号：US17583712

申请日：2022-01-25

Applicant: MKS Instruments, Inc.

Inventor： Johannes Chiu ,  Xing Chen ,  Chiu-Ying Tai ,  Michael Harris ,  Atul Aupta

IPC: G01N33/00 ,  G01K17/06 ,  G01N27/12 ,  G01N21/3504

Abstract: The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the compound stream flowing within the sampling tube based on the measured temperature change of the sampling tube.

公开(公告)号：US11733224B2

公开(公告)日：2023-08-22

申请号：US17583712

申请日：2022-01-25

Applicant: MKS Instruments, Inc.

Inventor： Johannes Chiu ,  Xing Chen ,  Chiu-Ying Tai ,  Michael Harris ,  Atul Aupta

IPC: G01N33/00 ,  G01K17/06 ,  G01N27/12 ,  G01N21/3504

CPC classification number: G01N33/0031 ,  G01K17/06 ,  G01N21/3504 ,  G01N27/122 ,  G01N33/0016

Abstract: The present application is directed to a method of measuring the concentration of radicals in a gas stream which includes the steps of flowing a radical gas stream emitted from at least one radical gas generator to at least one processing chamber, providing at least one sampling reaction module having at least one sampling tube therein, establishing a reference temperature of the sampling tube with at least one thermal control module, diverting a portion of the radical gas steam from the radical gas generator into the sampling tube, reacting at least one reagent with at least one radical gas within a defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream, the compound stream flowing within the sampling tube, measuring a change of temperature of the sampling tube due to interaction of the chemical species within the compound stream and the sampling tube with sensor module, and calculating a concentration of the chemical species within the compound stream flowing within the sampling tube based on the measured temperature change of the sampling tube.