公开(公告)号：US10892153B2

公开(公告)日：2021-01-12

申请号：US16713713

申请日：2019-12-13

Applicant: MKS Instruments, Inc.

Inventor： James E. Blessing ,  Jonathan Leslie ,  Jonathan Hugh Batey

IPC: H01J49/14 ,  H01J49/08

Abstract: Apparatus (e.g., ion source), systems (e.g., residual gas analyzer), and methods provide extended life and improved analytical stability of mass spectrometers in the presence of contamination gases while achieving substantial preferential ionization of sampled gases over internal background gases. One embodiment is an ion source that includes a gas source, nozzle, electron source, and electrodes. The gas source delivers gas via the nozzle to an evacuated ionization volume and is at a higher pressure than that of the evacuated ionization volume. Gas passing through the nozzle freely expands in an ionization region of the ionization volume. The electron source emits electrons through the expanding gas in the ionization region to ionize at least a portion of the expanding gas. The electrodes create electrical fields for ion flow from the ionization region to a mass filter and are located at distances from the nozzle and oriented to limit their exposure to the gas.

公开(公告)号：US10541122B2

公开(公告)日：2020-01-21

申请号：US15621241

申请日：2017-06-13

Applicant: MKS Instruments, Inc.

Inventor： James E. Blessing ,  Jonathan Leslie ,  Jonathan Hugh Batey

IPC: H01J49/14 ,  H01J49/08

Abstract: Apparatus (e.g., ion source), systems (e.g., residual gas analyzer), and methods provide extended life and improved analytical stability of mass spectrometers in the presence of contamination gases while achieving substantial preferential ionization of sampled gases over internal background gases. One embodiment is an ion source that includes a gas source, nozzle, electron source, and electrodes. The gas source delivers gas via the nozzle to an evacuated ionization volume and is at a higher pressure than that of the evacuated ionization volume. Gas passing through the nozzle freely expands in an ionization region of the ionization volume. The electron source emits electrons through the expanding gas in the ionization region to ionize at least a portion of the expanding gas. The electrodes create electrical fields for ion flow from the ionization region to a mass filter and are located at distances from the nozzle and oriented to limit their exposure to the gas.

公开(公告)号：US20180358217A1

公开(公告)日：2018-12-13

申请号：US15621241

申请日：2017-06-13

Applicant: MKS Instruments, Inc.

Inventor： James E. Blessing ,  Jonathan Leslie ,  Jonathan Hugh Batey

IPC: H01J49/14 ,  H01J49/08

CPC classification number: H01J49/147 ,  H01J49/08

Abstract: Apparatus (e.g., ion source), systems (e.g., residual gas analyzer), and methods provide extended life and improved analytical stability of mass spectrometers in the presence of contamination gases while achieving substantial preferential ionization of sampled gases over internal background gases. One embodiment is an ion source that includes a gas source, nozzle, electron source, and electrodes. The gas source delivers gas via the nozzle to an evacuated ionization volume and is at a higher pressure than that of the evacuated ionization volume. Gas passing through the nozzle freely expands in an ionization region of the ionization volume. The electron source emits electrons through the expanding gas in the ionization region to ionize at least a portion of the expanding gas. The electrodes create electrical fields for ion flow from the ionization region to a mass filter and are located at distances from the nozzle and oriented to limit their exposure to the gas.