公开(公告)号：US11536755B2

公开(公告)日：2022-12-27

申请号：US16887346

申请日：2020-05-29

Applicant: MKS Instruments, Inc.

Inventor： Larry J. Fisk, II ,  Benjamin J. Gitlin ,  Mariusz Oldziej ,  Aaron M. Burry ,  Matthew G. Harrington ,  Aaron T. Radomski

IPC: H01J37/32 ,  G01R29/02 ,  G01R23/16

Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

公开(公告)号：US10930470B2

公开(公告)日：2021-02-23

申请号：US16710412

申请日：2019-12-11

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. Radomski ,  Ky Luu ,  Larry J. Fisk, II ,  Ross Reinhardt ,  Matthew G. Harrington ,  Amish Rughoonundon ,  Jesse N. Klein ,  Aaron M. Burry

IPC: H05B33/00 ,  H01J37/32 ,  H01L21/3065 ,  H05H1/46

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

公开(公告)号：US10546724B2

公开(公告)日：2020-01-28

申请号：US15974947

申请日：2018-05-09

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. Radomski ,  Ky Luu ,  Larry J. Fisk, II ,  Ross Reinhardt ,  Matthew G. Harrington ,  Amish Rughoonundon ,  Jesse N. Klein ,  Aaron M. Burry

IPC: H05B33/00 ,  H01J37/32 ,  H01L21/3065 ,  H05H1/46

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.