公开(公告)号：US11935726B2

公开(公告)日：2024-03-19

申请号：US17480993

申请日：2021-09-21

Applicant: MKS Instruments, Inc. ,  LAM RESEARCH CORPORATION

Inventor： Aaron T. Radomski ,  Benjamin J. Gitlin ,  Larry J. Fisk, II ,  Mariusz Oldziej ,  Aaron M. Burry ,  Jonathan W. Smyka ,  Alexei Marakhtanov ,  Bing Ji ,  Felix Leib Kozakevich ,  John Holland ,  Ranadeep Bhowmick

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J2237/334

Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.

公开(公告)号：US12183549B2

公开(公告)日：2024-12-31

申请号：US17979129

申请日：2022-11-02

Applicant: MKS Instruments, Inc.

Inventor： Aaron Burry ,  Aaron Radomski ,  Mariusz Oldziej ,  Peter Paul ,  Ross Reinhardt

IPC: H01J37/32

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.

公开(公告)号：US10229816B2

公开(公告)日：2019-03-12

申请号：US15162960

申请日：2016-05-24

Applicant: MKS Instruments, Inc.

Inventor： David J. Coumou ,  Dennis M Brown ,  Aaron T. Radomski ,  Mariusz Oldziej ,  Yogendra K. Chawla ,  Daniel J. Lincoln

IPC: H01J37/32 ,  H03J7/08 ,  H03H11/28 ,  H05K7/20 ,  H03F1/02 ,  H03F1/32 ,  H03F1/56 ,  H03F3/189 ,  H03F3/217

Abstract: An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.

公开(公告)号：US20170345620A1

公开(公告)日：2017-11-30

申请号：US15162960

申请日：2016-05-24

Applicant: MKS Instruments, Inc.

Inventor： David J. Coumou ,  Dennis M. Brown ,  Aaron T. Radomski ,  Mariusz Oldziej ,  Yogendra K. Chawla ,  Daniel J. Lincoln

IPC: H01J37/32 ,  H03J7/08 ,  H03H11/28 ,  H05K7/20

CPC classification number: H01J37/32183 ,  H01J2237/334 ,  H03F1/0233 ,  H03F1/3223 ,  H03F1/56 ,  H03F3/189 ,  H03F3/217 ,  H03F2200/451 ,  H03H11/28 ,  H03J7/08 ,  H05K7/20136

Abstract: An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.

公开(公告)号：US12131884B2

公开(公告)日：2024-10-29

申请号：US18084696

申请日：2022-12-20

Applicant: MKS Instruments, Inc.

Inventor： Mariusz Oldziej ,  Aaron Radomski ,  Aaron Burry ,  Michael Kirk

IPC: H03H11/28 ,  H01J37/32

CPC classification number: H01J37/32146 ,  H03H11/28 ,  H01J2237/24507 ,  H01J2237/334

Abstract: A radio frequency (RF) generator includes a RF power source configured to output an RF power signal, and a controller coupled to the RF power source. The controller is configured to generate a pulse to modulate the RF power signal of the RF power source. The pulse includes one or more state transitions. The controller is further configured to receive a sync signal indicative of one or more operating characteristics or parameters of another RF generator, and adjust at least one of the state transitions of the pulse to synchronize the state transition with a defined phase of the received sync signal. Other example RF generators, RF power delivery systems including one or more RF generators, and control methods for adjusting a state transition of a pulse to synchronize the state transition with a defined phase of a sync signal are also disclosed.

公开(公告)号：US11536755B2

公开(公告)日：2022-12-27

申请号：US16887346

申请日：2020-05-29

Applicant: MKS Instruments, Inc.

Inventor： Larry J. Fisk, II ,  Benjamin J. Gitlin ,  Mariusz Oldziej ,  Aaron M. Burry ,  Matthew G. Harrington ,  Aaron T. Radomski

IPC: H01J37/32 ,  G01R29/02 ,  G01R23/16

Abstract: An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

公开(公告)号：US11527384B2

公开(公告)日：2022-12-13

申请号：US17102598

申请日：2020-11-24

Applicant: MKS Instruments, Inc.

Inventor： Aaron M. Burry ,  Aaron T. Radomski ,  Mariusz Oldziej ,  Peter Paul ,  Ross Reinhardt

IPC: H01J37/32

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.

公开(公告)号：US11158488B2

公开(公告)日：2021-10-26

申请号：US16452716

申请日：2019-06-26

Applicant: MKS Instruments, Inc. ,  LAM RESEARCH CORPORATION

Inventor： Aaron T. Radomski ,  Benjamin J. Gitlin ,  Larry J. Fisk, II ,  Mariusz Oldziej ,  Aaron M. Burry ,  Jonathan W. Smyka ,  Alexei Marakhtanov ,  Bing Ji ,  Felix Leib Kozakevich ,  John Holland ,  Ranadeep Bhowmick

IPC: H01J37/32

Abstract: A radio frequency (RF) generator system includes first and second RF power sources, each RF power source applying a respective RF signal and second RF signal to a load. The first RF signal is applied in accordance with the application of the second RF signal. The application of the first RF signal is synchronized to application of the second RF signal. The first RF signal may be amplitude modulated in synchronization with the second RF signal, and the amplitude modulation can include blanking of the first RF signal. A frequency offset may be applied to the first RF signal in synchronization with the second RF signal. A variable actuator associated with the first RF power source may be controlled in accordance with the second RF signal.