公开(公告)号：US08887575B2

公开(公告)日：2014-11-18

申请号：US13649476

申请日：2012-10-11

Applicant: MKS Instruments, Inc.

Inventor： Steven D. Blankenship ,  Paul D. Lucas

IPC: G01L9/12 ,  G01L19/06 ,  G01N27/22

CPC classification number: G01N27/227 ,  G01L9/0075 ,  G01L19/0636

Abstract: One or more reactive gases are introduced to a capacitance manometer at a particular area or areas of the diaphragm between the inner and outer capacitive electrodes so the error-inducing measurement effects of positive and negative bending are neutralized or minimized. Additionally, a guard structure may be used with the electrode structure of the capacitance manometer. The guard structure presents an area that is relatively insensitive to the diffusion of the gas into the diaphragm and the resulting changing surface tension, thus providing increased or optimal stability of the zero reading of the manometer. The guard may also provide electrostatic isolation of the electrodes.

Abstract translation: 一个或多个反应性气体被引入到电容式压力计之间的膜片的特定区域或内部和外部电容电极之间，因此正和负弯曲的误差测量效果被中和或最小化。 另外，保护结构可以与电容式压力计的电极结构一起使用。 防护结构呈现出对气体扩散到隔膜中相对不敏感的区域以及由此产生的变化的表面张力，从而提供压力计的零读数的增加或最佳的稳定性。 护罩还可以提供电极的静电隔离。

公开(公告)号：US20130189160A1

公开(公告)日：2013-07-25

申请号：US13649476

申请日：2012-10-11

Applicant: MKS Instruments, Inc.

Inventor： Steven D. Blankenship ,  Paul D. Lucas

IPC: G01N27/22

CPC classification number: G01N27/227 ,  G01L9/0075 ,  G01L19/0636

Abstract: One or more reactive gases are introduced to a capacitance manometer at a particular area or areas between the inner and outer capacitive electrodes so the error-inducing measurement effects of positive and negative bending is neutralized or minimized. Additionally, a guard structure may be used for the electrode structure of the capacitance manometer. The guard structure presents an area that is relatively insensitive to the diffusion of the gas into the diaphragm and the resulting changing surface tension, curvature and deflection, thus providing increased or optimal stability of the zero reading and pressure reading of the manometer. The guard may also provide electrostatic isolation of the electrodes.

Abstract translation: 将一个或多个反应性气体引入电容式压力计中的内部和外部电容电极之间的特定区域或区域，从而中和或最小化正和负弯曲的误差测量效应。 此外，可以使用保护结构用于电容式压力计的电极结构。 防护结构呈现对气体扩散到隔膜中相对不敏感的区域以及由此产生的变化的表面张力，曲率和偏转，从而提供压力计的零读数和压力读数的增加或最佳的稳定性。 护罩还可以提供电极的静电隔离。