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公开(公告)号：US20210293644A1
公开(公告)日：2021-09-23
申请号：US16825994
申请日：2020-03-20
Applicant: MKS Instruments, Inc.
Inventor： Phillip W. Sullivan , Sergei Syssoev , Ethan E. Manor , Swaminathan Venkatesan , Paul D. Lucas
Abstract: A capacitance manometer is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.
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公开(公告)号：US20130189160A1
公开(公告)日：2013-07-25
申请号：US13649476
申请日：2012-10-11
Applicant: MKS Instruments, Inc.
Inventor： Steven D. Blankenship , Paul D. Lucas
IPC: G01N27/22
CPC classification number: G01N27/227 , G01L9/0075 , G01L19/0636
Abstract: One or more reactive gases are introduced to a capacitance manometer at a particular area or areas between the inner and outer capacitive electrodes so the error-inducing measurement effects of positive and negative bending is neutralized or minimized. Additionally, a guard structure may be used for the electrode structure of the capacitance manometer. The guard structure presents an area that is relatively insensitive to the diffusion of the gas into the diaphragm and the resulting changing surface tension, curvature and deflection, thus providing increased or optimal stability of the zero reading and pressure reading of the manometer. The guard may also provide electrostatic isolation of the electrodes.
Abstract translation: 将一个或多个反应性气体引入电容式压力计中的内部和外部电容电极之间的特定区域或区域，从而中和或最小化正和负弯曲的误差测量效应。 此外，可以使用保护结构用于电容式压力计的电极结构。 防护结构呈现对气体扩散到隔膜中相对不敏感的区域以及由此产生的变化的表面张力，曲率和偏转，从而提供压力计的零读数和压力读数的增加或最佳的稳定性。 护罩还可以提供电极的静电隔离。
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公开(公告)号：US09133960B2
公开(公告)日：2015-09-15
申请号：US13753019
申请日：2013-01-29
Applicant: MKS Instruments, Inc.
Inventor： Paul D. Lucas , Gordon Hill , Jaroslaw Wojciech Pisera
CPC classification number: F16K49/00 , F16K1/2261 , F16K3/10 , F16K49/007 , Y10T137/0419 , Y10T137/6416
Abstract: A valve assembly comprises: a valve body including a passageway through which a first gas can be transmitted through the valve assembly; a valve flow control element movable relative to the valve body between an opened position wherein flow through the passageway is at a maximum flow, and a closed position wherein flow through the passageway is at a minimum flow, the valve flow control element is shaped so that a control gap is provided between the valve body and valve flow control element through which the first gas can flow, and the dimensions of the control gap vary depending on the position of the valve flow control element relative to the valve body; and a gas injector arrangement for selectively injecting a second gas into the control gap when the valve assembly is used to control the flow of the first gas through the passageway. The injection of the second gas when the valve flow control element is at or near its closed position helps minimize condensate being deposited on the valve flow control element, as well as reduce the closed conductance of the valve.
Abstract translation: 阀组件包括：阀体，其包括通道，第一气体可以穿过所述通道穿过所述阀组件; 阀流量控制元件，其可相对于阀体在打开位置之间移动，打开位置，其中通过通道的流动处于最大流动，以及关闭位置，其中流过通道的流动处于最小流量，阀流量控制元件的形状使得 在阀体和阀流量控制元件之间提供控制间隙，第一气体可以通过该控制间隙流动，并且控制间隙的尺寸根据阀流量控制元件相对于阀体的位置而变化; 以及气体喷射器装置，用于当阀组件用于控制通过通道的第一气体的流动时，将第二气体选择性地喷射到控制间隙中。 当阀流量控制元件处于或接近其关闭位置时，第二气体的注入有助于最小化沉积在阀流量控制元件上的冷凝物，并且减小阀的闭合电导。
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Patent Agency Ranking
公开(公告)号：US08887575B2
公开(公告)日：2014-11-18
申请号：US13649476
申请日：2012-10-11
Applicant: MKS Instruments, Inc.
Inventor： Steven D. Blankenship , Paul D. Lucas
CPC classification number: G01N27/227 , G01L9/0075 , G01L19/0636
Abstract: One or more reactive gases are introduced to a capacitance manometer at a particular area or areas of the diaphragm between the inner and outer capacitive electrodes so the error-inducing measurement effects of positive and negative bending are neutralized or minimized. Additionally, a guard structure may be used with the electrode structure of the capacitance manometer. The guard structure presents an area that is relatively insensitive to the diffusion of the gas into the diaphragm and the resulting changing surface tension, thus providing increased or optimal stability of the zero reading of the manometer. The guard may also provide electrostatic isolation of the electrodes.
Abstract translation: 一个或多个反应性气体被引入到电容式压力计之间的膜片的特定区域或内部和外部电容电极之间，因此正和负弯曲的误差测量效果被中和或最小化。 另外，保护结构可以与电容式压力计的电极结构一起使用。 防护结构呈现出对气体扩散到隔膜中相对不敏感的区域以及由此产生的变化的表面张力，从而提供压力计的零读数的增加或最佳的稳定性。 护罩还可以提供电极的静电隔离。
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公开(公告)号：US11287342B2
公开(公告)日：2022-03-29
申请号：US16825994
申请日：2020-03-20
Applicant: MKS Instruments, Inc.
Inventor： Philip W. Sullivan , Sergei Syssoev , Ethan E. Mattor , Swaminathan Venkatesan , Paul D. Lucas
Abstract: A capacitive manometer offering improved measurement accuracy is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle less prone to transient measurement errors having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.
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公开(公告)号：US09562820B2
公开(公告)日：2017-02-07
申请号：US14072188
申请日：2013-11-05
Applicant: MKS Instruments, Inc.
Inventor： Lei Gu , Paul D. Lucas , Stephen F. Bart , Philip W. Sullivan
CPC classification number: G01L19/0092 , G01L9/0072
Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
Abstract translation: 压力传感器可以测量气体或液体压力。 腔室可以具有接收气体或液体的入口。 柔性隔膜可以在室内，其具有在流过入口之后暴露于气体或液体的表面。 压力传感器系统可以感测由气体或液体的压力变化引起的柔性隔膜的变化。 压力敏感传感器系统可以感测柔性隔膜的不是由气体或液体的压力变化引起的变化。 压力敏感传感器系统可能对由气体或液体的压力变化引起的柔性隔膜的变化不敏感。
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公开(公告)号：US20140238103A1
公开(公告)日：2014-08-28
申请号：US14072188
申请日：2013-11-05
Applicant: MKS INSTRUMENTS, INC.
Inventor： Lei Gu , Paul D. Lucas , Stephen F. Bart , Phillip W. Sullivan
IPC: G01L7/08
CPC classification number: G01L19/0092 , G01L9/0072
Abstract: A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
Abstract translation: 压力传感器可以测量气体或液体压力。 腔室可以具有接收气体或液体的入口。 柔性隔膜可以在室内，其具有在流过入口之后暴露于气体或液体的表面。 压力传感器系统可以感测由气体或液体的压力变化引起的柔性隔膜的变化。 压力敏感传感器系统可以感测柔性隔膜的不是由气体或液体的压力变化引起的变化。 压力敏感传感器系统可能对由气体或液体的压力变化引起的柔性隔膜的变化不敏感。
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公开(公告)号：US20140209181A1
公开(公告)日：2014-07-31
申请号：US13753019
申请日：2013-01-29
Applicant: MKS Instruments, Inc.
Inventor： Paul D. Lucas , Gordon Hill , Jaroslaw Wojciech Pisera
IPC: F16K49/00
CPC classification number: F16K49/00 , F16K1/2261 , F16K3/10 , F16K49/007 , Y10T137/0419 , Y10T137/6416
Abstract: A valve assembly comprises: a valve body including a passageway through which a first gas can be transmitted through the valve assembly; a valve flow control element movable relative to the valve body between an opened position wherein flow through the passageway is at a maximum flow, and a closed position wherein flow through the passageway is at a minimum flow, the valve flow control element is shaped so that a control gap is provided between the valve body and valve flow control element through which the first gas can flow, and the dimensions of the control gap vary depending on the position of the valve flow control element relative to the valve body; and a gas injector arrangement for selectively injecting a second gas into the control gap when the valve assembly is used to control the flow of the first gas through the passageway. The injection of the second gas when the valve flow control element is at or near its closed position helps minimize condensate being deposited on the valve flow control element, as well as reduce the closed conductance of the valve.
Abstract translation: 阀组件包括：阀体，其包括通道，第一气体可以穿过所述通道穿过所述阀组件; 阀流量控制元件，其可相对于阀体在打开位置之间移动，打开位置，其中通过通道的流动处于最大流动，以及关闭位置，其中流过通道的流动处于最小流量，阀流量控制元件的形状使得 在阀体和阀流量控制元件之间提供控制间隙，第一气体可以通过该控制间隙流动，并且控制间隙的尺寸根据阀流量控制元件相对于阀体的位置而变化; 以及气体喷射器装置，用于当阀组件用于控制通过通道的第一气体的流动时，将第二气体选择性地喷射到控制间隙中。 当阀流量控制元件处于或接近其关闭位置时，第二气体的注入有助于最小化沉积在阀流量控制元件上的冷凝物，并且减小阀的闭合电导。
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