公开(公告)号：US20230024945A1

公开(公告)日：2023-01-26

申请号：US17786780

申请日：2020-12-21

Applicant: MOLECULAR PLASMA GROUP SA

Inventor： Gill SCHELTJENS ,  Joanna DONTEN ,  Bertrand SCHONS ,  Regis HEYBERGER

IPC: C23C16/513 ,  C23C16/455 ,  H05H1/34 ,  C23C4/134

Abstract: A plasma coating an object has an object profile, and includes the steps of: providing a replaceable shield including a jet inlet, a nozzle outlet and a sidewall extending from the jet inlet to the nozzle outlet; detachably attaching the replaceable shield to a jet outlet of a plasma jet generator; placing the object at the nozzle outlet such that the object profile fits closely to the nozzle outlet edge to within a distance of at least 0.1 mm and at most 5 mm; plasma coating the object with a low-temperature, oxygen-free plasma at an operating pressure which is higher than the atmospheric pressure by providing a plasma jet in the shield via the plasma jet generator and injecting coating precursors in the plasma jet in the shield; identifying the provided shield prior to providing the plasma jet.