公开(公告)号：US3694165A

公开(公告)日：1972-09-26

申请号：US3694165D

申请日：1970-08-11

Applicant: MONSANTO CO

Inventor： KRAMER HORST G

IPC: C30B15/14 ,  B01J11/18

CPC classification number: C30B15/14 ,  Y10S117/90 ,  Y10T117/1068

Abstract: CRUCIBLE APPARATUS FOR A SEMICONDUCTOR CRYSTAL PULLER AND INCLUDING A MAIN CRUCIBLE FOR HOUSING A MOLTEN CHARGE OF SEMICONDUCTOR MATERIAL TO BE PULLED. A HOLLOW CRUCIBLE BASE OR SUPPORT MEMBER IS MOUNTED BETWEEN THE MAIN CRUCIBLE AND AN ELONGATED CRUCIBLE SUPPORT PEDESTAL, AND A PORTION OF THE MAIN CRUCIBLE BOTTOM IS SUSPENDED IN THE CRUCIBLE BASE MEMBER TO REDUCE CONDUCTIVE HEAT LOSSES THEREFROM. THE CRUCIBLE BASE MEMBER SHILEDS HEAT RADIATED FROM THE MAIN CRUCIBLE AND COUPLES INTO THE RF HEATER COIL THEREOF TO EVEN FURTHER REDUCE HEAT LOSSES FROM THE MAIN CRUCIBLE. THE CRUCIBLE BASE MEMBER THUS MINIMIZES TEMPERATURE GRADIENTS IN THE MAIN CRUCIBLE AND THEREBY ELIMINATES AN UNDERSIRABLE COOLING OF THE MOLTEN SEMICONDUCTOR MATERIAL DURING A CRYSTAL PULLING OPERATION.