公开(公告)号：US20240359372A1

公开(公告)日：2024-10-31

申请号：US18686440

申请日：2022-08-17

申请人： Magic Leap, Inc.

发明人： Shuqiang YANG ,  Vikramjit SINGH ,  David James LENTZ ,  Frank Y. XU ,  Marlon Edward MENEZES ,  Yanhua WANG

IPC分类号： B29C43/02 ,  B29C33/42 ,  B29C43/40 ,  B29L11/00

CPC分类号： B29C43/021 ,  B29C33/424 ,  B29C43/40 ,  B29C2043/025 ,  B29L2011/0075

摘要： Methods are disclosed for fabricating molds for forming waveguides with integrated spacers for forming eyepieces. The molds are formed by etching features (e.g., 1 μm to 1000 μm deep) into a substrate comprising single crystalline material using an anisotropic wet etch. The etch masks for defining the large features may comprise a plurality of holes, wherein the size and shape of each hole at least partially determine the depth of the corresponding large feature. The holes may be aligned along a crystal axis of the substrate and the etching may automatically stop due to the crystal structure of the substrate. The patterned substrate may be utilized as a mold onto which a flowable polymer may be introduced and allowed to harden. Hardened polymer in the holes may form a waveguide with integrated spacers. The mold may be also used to fabricate a platform comprising a plurality of vertically extending microstructures of precise heights, to test the curvature or flatness of a sample, e.g., based on the amount of contact between the microstructures and the sample.