公开(公告)号：US09148631B2

公开(公告)日：2015-09-29

申请号：US13881378

申请日：2011-10-26

申请人： Makoto Ono ,  Takafumi Chida ,  Takehiro Hirai ,  Masakazu Kanezawa

发明人： Makoto Ono ,  Takafumi Chida ,  Takehiro Hirai ,  Masakazu Kanezawa

IPC分类号： H04N7/18 ,  H01J37/28 ,  G01N23/225

CPC分类号： H04N7/18 ,  G01N23/2251 ,  G01N2223/3301 ,  G01N2223/418 ,  G01N2223/611 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/2811 ,  H01J2237/2815 ,  H01J2237/2817

摘要： In imaging a sample using an electron microscope, in order to reduce a time for focusing, a scanning range of a Z coordinate is reduced to complete focusing by obtaining SEM images such that: for a first predetermined number of portions, focal positions of an electron beam in obtaining each SEM image are moved in a predetermined range; then, a curved surface shape of the surface of the sample is estimated by using information relating to the focal positions of the electron beam in the first predetermined number of portions; after the images are taken, the range in which the focal positions of the electron beam are moved for scanning the electron beam on the surface of the sample is made to be narrower than the predetermined range by using the curved surface information estimated, thereby performing scanning to take the images of the sample.

摘要翻译： 在使用电子显微镜对样品进行成像时，为了减少聚焦时间，通过获得SEM图像来减小Z坐标的扫描范围以完成聚焦，使得：对于第一预定数量的部分，电子的焦点位置 获得每个SEM图像的光束在预定范围内移动; 然后，通过使用与第一预定数量的电子束的焦点位置有关的信息来估计样品表面的曲面形状; 在拍摄图像之后，通过使用估计的曲面信息使电子束的焦点位置移动以扫描样品表面上的电子束的范围比预定范围窄，从而执行扫描 拍摄样品的图像。

公开(公告)号：US20130235182A1

公开(公告)日：2013-09-12

申请号：US13881378

申请日：2011-10-26

申请人： Makoto Ono ,  Takafumi Chida ,  Takehiro Hirai ,  Masakazu Kanezawa

发明人： Makoto Ono ,  Takafumi Chida ,  Takehiro Hirai ,  Masakazu Kanezawa

IPC分类号： H04N7/18

CPC分类号： H04N7/18 ,  G01N23/2251 ,  G01N2223/3301 ,  G01N2223/418 ,  G01N2223/611 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/2811 ,  H01J2237/2815 ,  H01J2237/2817

摘要： In imaging a sample using an electron microscope, in order to reduce a time for focusing, a scanning range of a Z coordinate is reduced to complete focusing by obtaining SEM images such that: for a first predetermined number of portions, focal positions of an electron beam in obtaining each SEM image are moved in a predetermined range; then, a curved surface shape of the surface of the sample is estimated by using information relating to the focal positions of the electron beam in the first predetermined number of portions; after the images are taken, the range in which the focal positions of the electron beam are moved for scanning the electron beam on the surface of the sample is made to be narrower than the predetermined range by using the curved surface information estimated, thereby performing scanning to take the images of the sample.

摘要翻译： 在使用电子显微镜对样品进行成像时，为了减少聚焦时间，通过获得SEM图像来减小Z坐标的扫描范围以完成聚焦，使得：对于第一预定数量的部分，电子的焦点位置 获得每个SEM图像的光束在预定范围内移动; 然后，通过使用与第一预定数量的电子束的焦点位置有关的信息来估计样品表面的曲面形状; 在拍摄图像之后，通过使用估计的曲面信息使电子束的焦点位置移动以扫描样品表面上的电子束的范围比预定范围窄，从而执行扫描 拍摄样品的图像。