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公开(公告)号:US06710348B1
公开(公告)日:2004-03-23
申请号:US09720938
申请日:2001-05-02
申请人: Manfred Rothley , Roland Mueller-Fiedler , Erich Zabler , Lars Erdmann , Wilhelm Leneke , Marion Simon , Karlheinz Storck , Joerg' Schieferdecker
发明人: Manfred Rothley , Roland Mueller-Fiedler , Erich Zabler , Lars Erdmann , Wilhelm Leneke , Marion Simon , Karlheinz Storck , Joerg' Schieferdecker
IPC分类号: G01J502
CPC分类号: G01J1/42 , G01J1/06 , G01J5/04 , G01J5/0806 , G01J5/12
摘要: An apparatus for sensing electromagnetic radiation with local resolution for image-producing sensors that can be economically produced and installed is decribed. This is achieved, in that a micromechanically producible optical imaging system is provided.
摘要翻译: 用于感测具有局部分辨率的用于可经济地生产和安装的图像产生传感器的电磁辐射的装置被描述。 这是通过提供微机械制造的光学成像系统来实现的。