公开(公告)号：US11307335B2

公开(公告)日：2022-04-19

申请号：US16059588

申请日：2018-08-09

Applicant: MARADIN LTD.

Inventor： Inbal Herer ,  Adi Baram ,  Matan Naftali

IPC: G02B5/08 ,  G02B5/20 ,  C03C25/223 ,  G02B1/10 ,  G02B27/09 ,  B81B3/00 ,  G02B26/08

Abstract: Optical apparatus comprising a MEMS substrate having a surface; and a stack of optical coatings which is deposited on the MEMS substrate's surface and which modifies at least one property of light impinging on the stack.

公开(公告)号：US11899226B2

公开(公告)日：2024-02-13

申请号：US17690442

申请日：2022-03-09

Applicant: Maradin Ltd.

Inventor： Inbal Herer ,  Adi Baram ,  Matan Naftali

IPC: G02B5/08 ,  G02B5/20 ,  C03C25/223 ,  G02B1/10 ,  G02B27/09 ,  B81B3/00 ,  G02B26/08

CPC classification number: G02B5/08 ,  B81B3/00 ,  C03C25/223 ,  G02B1/10 ,  G02B5/20 ,  G02B26/0833 ,  G02B27/0977

Abstract: Optical apparatus comprising a MEMS substrate having a surface; and a stack of optical coatings which is deposited on the MEMS substrate's surface and which modifies at least one property of light impinging on the stack.