Method for supplying gas to a chamber and method for regulating the
content of a given element in the atmosphere of such a chamber
    1.
    发明授权
    Method for supplying gas to a chamber and method for regulating the content of a given element in the atmosphere of such a chamber 失效
    向室内供给气体的方法以及用于调节这种室的气氛中的给定元素的含量的方法

    公开(公告)号:US6074203A

    公开(公告)日:2000-06-13

    申请号:US125529

    申请日:1998-08-20

    CPC classification number: B23K1/008 G05D11/138

    Abstract: The invention relates to a process for supplying gas to a chamber which is supplied via a supply network which includes at least one primary line connected in its upstream part to a supply of the said gas, and at least two respective secondary lines connected to the primary lines, being characterized in that the content of a given component of the atmosphere in the chamber is measured at least at one point in the chamber, the measured content is compared with at least one predetermined control value for the content of the said component of the atmosphere in the chamber at the said point and, where necessary, the pressure of the gas at one of the points in the network is varied, depending on the result of this comparison.

    Abstract translation: PCT No.PCT / FR97 / 02330 Sec。 371日期:1998年8月20日 102(e)1998年8月20日PCT PCT 1997年12月17日PCT公布。 第WO98 / 28102号公报 日期1998年7月2日本发明涉及一种向室供给气体的方法,所述室通过供应网络供应,所述供应网络包括在其上游部分连接到所述气体的至少一个主要管线,以及至少两个相应的次级 连接到主线路的线路,其特征在于,至少在腔室中的一个点处测量腔室中的气氛的给定分量的含量,将测量的内容与至少一个预定的控制值进行比较, 根据该比较的结果,在所述点处的腔室中的气氛的所述分量,以及必要时,在网络中的一个点处的气体的压力是变化的。

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