-
公开(公告)号:US20110195199A1
公开(公告)日:2011-08-11
申请号:US12737900
申请日:2009-08-26
申请人: Marco Huber , Wolfgang Becker , Patrick Binkowska , Bemhard Cord , Oliver Hohn , Stefan Kempf , Michael Reising , Björn Roos , Edgar Rüth , Eggo Sichmann , Peter Wohlfart
发明人: Marco Huber , Wolfgang Becker , Patrick Binkowska , Bemhard Cord , Oliver Hohn , Stefan Kempf , Michael Reising , Björn Roos , Edgar Rüth , Eggo Sichmann , Peter Wohlfart
CPC分类号: H01L21/67213 , C23C16/54 , H01L21/67167
摘要: The invention provides a coating system for coating substrates in a cyclic mode. The process stations of the coating system are disposed in a circular fashion. A handling mechanism is provided for transferring the substrates between the process stations. The process stations comprise a lock for loading and unloading the substrates, at least two coating chambers, each of which comprises a plasma source for stationary coating of the substrate, and preferably a heating station.
摘要翻译: 本发明提供了一种用于以循环模式涂覆基材的涂布系统。 涂布系统的处理站以圆形方式设置。 提供了处理机构,用于在处理站之间传送基板。 处理站包括用于装载和卸载衬底的锁,至少两个涂覆室,每个涂覆室包括用于衬底的固定涂覆的等离子体源,并且优选地为加热站。