公开(公告)号：US06543617B2

公开(公告)日：2003-04-08

申请号：US09802471

申请日：2001-03-09

申请人： Marie Angelopoulos ,  Wu-Song Huang ,  Ranee Wai-Ling Kwong ,  David Robert Medeiros ,  Wayne Martin Moreau ,  Karen Elizabeth Petrillo ,  Herman Russell Wendt ,  Christopher Karl Magg

发明人： Marie Angelopoulos ,  Wu-Song Huang ,  Ranee Wai-Ling Kwong ,  David Robert Medeiros ,  Wayne Martin Moreau ,  Karen Elizabeth Petrillo ,  Herman Russell Wendt ,  Christopher Karl Magg

IPC分类号： B65D8500

CPC分类号： G03F7/0012

摘要： The present invention includes a packaged coated workpiece. The packaged coated workpiece has: (1) a workpiece coated with a resist film sensitive to optical radiation, particulates or chemical contaminants; (2) an inner barrier sealed to enclose the coated workpiece and optionally a first getter agent, to produce a sealed first enclosure; and (3) an outer barrier sealed to enclose the sealed first enclosure and optionally a second getter agent, provided that the packaged coated workpiece has at least one getter agent, to produce a packaged coated workpiece suitable for storage for a period of at least one week without substantial loss of sensitvity, resolution or performance. The present invention also includes a process for preparing a packaged coated workpiece and a method of increasing the storage time of a coated workpiece to at least one week without substantial loss of sensitivity, resolution or performance.

摘要翻译： 本发明包括一个包装的涂层工件。 包装的涂层工件具有：（1）涂覆有对光辐射，微粒或化学污染物敏感的抗蚀剂膜的工件; （2）密封以封闭涂覆的工件和任选地第一吸气剂的内部阻隔件，以产生密封的第一外壳; 和（3）密封以封闭密封的第一外壳和任选的第二吸气剂的外屏障，只要所包封的涂覆的工件具有至少一个吸气剂，以产生适合于存储至少一个时间段的包装的涂覆的工件 周没有显着损失敏感性，分辨率或性能。 本发明还包括用于制备包装的涂层工件的方法以及将涂覆的工件的存储时间增加至少一周而不会显着降低灵敏度，分辨率或性能的方法。

公开(公告)号：US07168224B2

公开(公告)日：2007-01-30

申请号：US10295595

申请日：2002-11-15

申请人： Marie Angelopoulos ,  Wu-Song Huang ,  Ranee Wai-Ling Kwong ,  David Robert Medeiros ,  Wayne Martin Moreau ,  Karen Elizabeth Petrillo ,  Herman Russell Wendt ,  Christopher Karl Magg

发明人： Marie Angelopoulos ,  Wu-Song Huang ,  Ranee Wai-Ling Kwong ,  David Robert Medeiros ,  Wayne Martin Moreau ,  Karen Elizabeth Petrillo ,  Herman Russell Wendt ,  Christopher Karl Magg

IPC分类号： B65B29/00

CPC分类号： G03F7/0012

摘要： The present invention includes a packaged coated workpiece. The packaged coated workpiece has: (1) a workpiece coated with a resist film sensitive to optical radiation, particulates or chemical contaminants; (2) an inner barrier sealed to enclose the coated workpiece and optionally a first getter agent, to produce a sealed first enclosure; and (3) an outer barrier sealed to enclose the sealed first enclosure and optionally a second getter agent, provided that the packaged coated workpiece has at least one getter agent, to produce a packaged coated workpiece suitable for storage for a period of at least one week without substantial loss of sensitivity, resolution or performance. The present invention also includes a process for preparing a packaged coated workpiece and a method of increasing the storage time of a coated workpiece to at least one week without substantial loss of sensitivity, resolution or performance.

摘要翻译： 本发明包括一个包装的涂层工件。 包装的涂层工件具有：（1）涂覆有对光辐射，微粒或化学污染物敏感的抗蚀剂膜的工件; （2）密封以封闭涂覆的工件和任选地第一吸气剂的内部阻隔件，以产生密封的第一外壳; 和（3）密封以封闭密封的第一外壳和任选的第二吸气剂的外屏障，只要所包封的涂覆的工件具有至少一个吸气剂，以产生适合于存储至少一个时间段的包装的涂覆的工件 周没有明显的灵敏度，分辨率或性能的损失。 本发明还包括用于制备包装的涂层工件的方法以及将涂覆的工件的存储时间增加至少一周而不会显着降低灵敏度，分辨率或性能的方法。