公开(公告)号：US06514781B2

公开(公告)日：2003-02-04

申请号：US09900841

申请日：2001-07-07

申请人： Mark W. Chang ,  Scott D. Dalton ,  Michael J. Daneman ,  Timothy Beerling ,  Stephen F. Panyko ,  Gary M. Zalewski

发明人： Mark W. Chang ,  Scott D. Dalton ,  Michael J. Daneman ,  Timothy Beerling ,  Stephen F. Panyko ,  Gary M. Zalewski

IPC分类号： H01L2100

CPC分类号： G02B26/0841

摘要： A method and apparatus for maintaining the state of a MEMS device in the event of a power failure are disclosed. The apparatus and method may be used with a MEMS device generally having one or more MEMS elements moveably coupled to a substrate that uses electrostatic clamping force to sustain the state of the MEMS element. According to the method, a capacitive or other charge-storing circuit is coupled between a clamping surface and an electrical ground. During normal operation, a clamping voltage is applied between the clamping surface and at least one MEMS element to retain the at least one MEMS element against the clamping surface. In the event of a power failure, the source of the clamping voltage and other circuit paths to ground are isolated from the clamping surface. The charge-storing circuit maintains an electric charge on the clamping surface. Leaky circuit paths to ground may be isolated from the clamping surface by an isolator element configured to electrically isolate the clamping surface in the event of a power failure. The isolator element may include an opto-isolator or a low leakage diode.

摘要翻译： 公开了一种用于在电源故障的情况下保持MEMS装置的状态的方法和装置。 该装置和方法可以与通常具有一个或多个MEMS元件的MEMS器件一起使用，所述MEMS元件可移动地耦合到使用静电夹持力来维持MEMS元件的状态的基板。 根据该方法，电容或其他电荷存储电路耦合在夹紧表面和电接地之间。 在正常操作期间，钳位电压施加在夹紧表面和至少一个MEMS元件之间以将至少一个MEMS元件保持抵靠夹紧表面。 在电源故障的情况下，钳位电压的来源和其他到地的电路路径与夹紧表面隔离。 电荷存储电路在夹持表面上保持电荷。 泄漏电路到地的路径可以通过隔离器元件与夹紧表面隔离，隔离器元件被配置为在电源故障的情况下电隔离夹紧表面。 隔离元件可以包括光隔离器或低泄漏二极管。