公开(公告)号：US20130176825A1

公开(公告)日：2013-07-11

申请号：US13729709

申请日：2012-12-28

申请人： Markus HEITZ ,  Christoph GAUGER ,  Sebastian GRACKI ,  Patrick WELLNER

发明人： Markus HEITZ ,  Christoph GAUGER ,  Sebastian GRACKI ,  Patrick WELLNER

IPC分类号： G01V1/18

CPC分类号： G01V1/18 ,  G01C19/5747

摘要： A sensor structure includes a substrate having a main extension plane, a first seismic mass and a second seismic mass, the first and the second seismic masses being deflectable relative to the substrate along a direction of deflection essentially perpendicular to the main extension plane. The first and second seismic masses are coupled together via a rigid coupling rocker pivotable around a rocker axis parallel to the main extension plane. The first seismic mass is suspended from the substrate with the aid of a first suspension spring, and an essentially rigid first coupling bar is situated between the first suspension spring and the first seismic mass.

摘要翻译： 传感器结构包括具有主延伸平面的基板，第一地震块和第二地震块，第一和第二地震块相对于基板沿着基本上垂直于主延伸平面的偏转方向可偏转。 第一和第二地震块通过刚性耦合摇杆联接在一起，所述刚性联轴器可围绕平行于主延伸平面的摇臂轴线枢转。 借助于第一悬架弹簧，第一抗震块从衬底悬挂，并且基本上刚性的第一联接杆位于第一悬架弹簧和第一抗震块之间。