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公开(公告)号：US08955432B2
公开(公告)日：2015-02-17
申请号：US13568329
申请日：2012-08-07
CPC分类号： B41F16/00 , H05K3/1275 , H05K2203/082
摘要： The supply of a negative pressure to an opening P(+1) adjacent to an opening P(0) is stopped by switching a suction valve connected to the opening P(+1) from an open state to a closed state while keeping a positive pressure valve connected thereto closed. Then, near the opening P(+1), a force for holding a blanket becomes gradually weaker against a pressure force in a pressurized space. Associated with that, an air component in the pressurized space flows into a space between a portion of the blanket vertically above the opening P(+1) and an upper surface, whereby the blanket portion is lifted from the upper surface and brought into contact with the lower surface of a printing plate. In this way, a contact area is slowly and stably widened while a sudden change of a pressure in the pressurized space SP5 is suppressed.
摘要翻译： 通过将连接到开口P（+1）的吸入阀从打开状态切换到关闭状态，同时保持正的状态来停止向开口P（0）附近的开口P（+1）供给负压 与其连接的压力阀关闭。 然后，在开口P（+1）附近，用于保持橡皮布的力相对于加压空间中的压力逐渐变弱。 与此相关联，加压空间中的空气部件流入在开口P（+1）上方垂直上方的橡皮布的一部分之间的空间和上表面，由此橡皮布部分从上表面提升并与 印版的下表面。 以这种方式，在抑制加压空间SP5中的压力的突然变化的同时，接触面积缓慢且稳定地变宽。
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公开(公告)号：US09327488B2
公开(公告)日：2016-05-03
申请号：US13599534
申请日：2012-08-30
CPC分类号： B41F1/16 , B41F33/0081 , B41P2233/13
摘要： A carrier and a substrate are aligned even if an imager cannot be simultaneously focused on alignment marks formed on both the carrier and the substrate. Center of gravity positions G1m of an alignment pattern element AP1 on a substrate and G2m of an alignment pattern element AP2 on a transparent blanket are calculated by image processing from an image IM imaged via the blanket by a CCD camera. The position of the center of gravity Gm2 is specified by a process associated with edge extraction from the image imaged with the alignment pattern element AP2 on the blanket being in focus. High spatial frequency components are removed and low frequency components are extracted for the alignment pattern element AP1 on the substrate imaged out of focus to have a blurred outline, and the position of the center of gravity G1m is specified from an extraction result.
摘要翻译： 即使成像器不能同时聚焦在形成在载体和衬底上的对准标记上，载体和衬底也被对准。 通过CCD照相机从通过毯子成像的图像IM的图像处理来计算基板上的对准图案元件AP1的重心位置G1m和透明毯子上的对准图案元件AP2的G2m。 重心Gm2的位置由与被对准的毯子上的对准图案元件AP2成像的图像的边缘提取相关联的处理来指定。 去除高空间频率分量，并且提取低频分量，使得对准图案元件AP1在被对焦成像的基板上具有模糊轮廓，并且从提取结果确定重心G1m的位置。
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3.发明授权公开(公告)号：US08893620B2
公开(公告)日：2014-11-25
申请号：US13654767
申请日：2012-10-18
摘要： A print section patterns a coating layer to form a pattern layer on a carrier and then transfers the pattern layer to a substrate. A controller obtains a first carrier thickness by measuring the thickness of the carrier carrying the coating layer and adjusts a gap between the carrier carrying the coating layer and the printing plate based on the first carrier thickness immediately before the coating layer is patterned. The controller also obtains a second carrier thickness by measuring the thickness of the carrier carrying the pattern layer and adjusts a gap between the carrier carrying the pattern layer and the substrate based on the second carrier thickness immediately before the pattern layer is transferred.
摘要翻译： 打印部分形成涂层以在载体上形成图案层，然后将图案层转移到基底。 控制器通过测量承载涂层的载体的厚度来获得第一载体厚度，并且在涂覆涂层被图案化之前基于第一载体厚度调节承载涂层和印刷版的载体之间的间隙。 控制器还通过测量携带图案层的载体的厚度来获得第二载体厚度，并且在紧靠图案层转移之前基于第二载体厚度调节承载图案层的载体与基板之间的间隙。
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公开(公告)号：US20080295769A1
公开(公告)日：2008-12-04
申请号：US12108801
申请日：2008-04-24
申请人： Masafumi Kawagoe , Tomoyuki Komura
发明人： Masafumi Kawagoe , Tomoyuki Komura
IPC分类号： B05C11/00
CPC分类号： H01L21/67092 , H01L21/67109 , H01L21/67253 , H01L21/67259 , H01L21/68 , H01L21/6875
摘要： A second plate is disposed opposing to a first plate. The second plate is supported by three supporting members which are disposed in a circle about a central axis. The supporting members are provided with extensible portions, respectively and are arranged to be able to extend and contract in a moving direction. A control unit drives to extend and to contract the extensible portions independently to displace the second plate in the moving direction at the supporting portion at which the supporting members support the second plate. Hence, the relative tilt of the second plate relative to the first plate is corrected.
摘要翻译： 第二板被布置成与第一板相对。 第二板由围绕中心轴设置成圆的三个支撑构件支撑。 支撑构件分别设置有可延伸部分，并且被布置成能够沿移动方向延伸和收缩。 控制单元驱动以独立地延伸和收缩可伸展部分，以在支撑部件支撑第二板的支撑部分沿移动方向移位第二板。 因此，校正第二板相对于第一板的相对倾斜度。
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公开(公告)号：US06712579B2
公开(公告)日：2004-03-30
申请号：US10121778
申请日：2002-04-11
申请人： Kenji Fujii , Fuminori Asa , Ryuichi Hayama , Tomoyuki Komura
发明人： Kenji Fujii , Fuminori Asa , Ryuichi Hayama , Tomoyuki Komura
IPC分类号： B66C2300
CPC分类号： H01L21/68707
摘要： A substrate transfer apparatus provided with a first substrate transfer mechanism having a first substrate holding hand which is movable while holding a substrate; and a second substrate transfer mechanism having a second substrate holding hand for receiving and transferring a substrate directly from and to the first substrate holding hand. The apparatus has a positioning mechanism disposed, in a moving passage of a substrate held by the first substrate holding hand, independently from the first substrate transfer mechanism, and having a positioning contact portion for regulating the movement of a substrate such that the substrate is positioned at a predetermined position on the first substrate holding hand.
摘要翻译： 一种基板传送装置，其具有第一基板传送机构，该第一基板传送机构具有可保持基板的同时可移动的第一基板固定手; 以及具有第二基板固定手的第二基板传送机构，用于直接从第一基板夹持手接收和传送基板。 该设备具有定位机构，该定位机构设置在与第一基板握持手保持的基板的移动通道中，独立于第一基板传送机构，并且具有用于调节基板的移动的定位接触部分，使得基板定位 在第一基板握持手的预定位置处。
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