摘要:
A thermo-sensitive flow rate sensor having a flow rate detecting device comprising: a plate-like substrate; a heating element and a temperature compensating element constituted by thermo-sensitive resistance films and formed on a top surface of the substrate in such a way as to be spaced apart from each other; and a low heat capacity portion formed by removing partially an area, in which the heating element is formed, of the substrate from a back surface side thereof. This thermo-sensitive flow rate sensor is used for measuring the flow velocity or flow rate of a measurement fluid according to a heat transfer phenomenon where a heat is transferred from the heating element or from a portion heated by the heating element to the measurement fluid. In this thermo-sensitive flow rate sensor, a diaphragm is constructed by forming at least one cavity by removing partially a region other than the area, in which the heating element and the temperature compensating element are formed, of the substrate from the back surface side thereof.
摘要:
A flow rate detector has a detection pipe (26) disposed in a fluid channel (21), a supporting member (27) for supporting a thermosensitive flow rate sensor (28) being provided in the detection pipe (26). The supporting member (27) has a sensor holding portion (27a) which has a predetermined width and a broadening portion (27b) which is adjacent to one end of the sensor holding portion (27a) and the width of which gradually increases from the distal end thereof toward the sensor holding portion (27a). The flow rate sensor (28) is built in a side surface of the sensor holding portion (27a) such that it is exposed in the detection pipe (26).
摘要:
A thermosensitive flow rate detecting element having a flat substrate is provided with a gap having an opening on at least one side thereof for the flow of a fluid, an insulating support film provided on the one side of the substrate, a sensor unit which has a heating element for heating the fluid and a thermosensitive element for detecting temperature of the fluid provided in the upper position of the opening on the insulating support film, and a fluid temperature measuring element, provided at a distance from the sensor unit on the one side of the flat substrate, for detecting temperature of the fluid. The thermosensitive flow rate detecting element measures flow rate or flow velocity of the fluid on the basis of a temperature detected by the thermosensitive element, by keeping heating temperature of the heating element at a level higher than a temperature detected by the fluid temperature measuring element by a prescribed difference in temperature. A first notch is provided on the flat substrate near the fluid temperature measuring element and is formed by removing a part of the flat substrate from either side thereof so as not to reach the remaining side thereof.
摘要:
A thermo-sensitive flow rate sensor that comprises a plate-like substrate, a part of which is removed so that a space is provided therein, a diaphragm portion formed like a thin layer above the space in such a manner as to be integral with the plate-like substrate, and a heating element constituted by a thermo-sensitive electrically resistant film formed on the diaphragm. Plural holes penetrating the diaphragm portion are bored in an outer peripheral portion of the heating element. Each of the plurality of holes is shaped in such a way as to have obtuse corner portions or to have substantially no corner portions. The thermo-sensitive flow rate sensor measures the flow rate of a fluid, which is to be measured, according to an amount of heat transferred to the fluid from a part heated by energizing the heating element.
摘要:
A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer including a support film and a protective film on one surface of a flat substrate, a heating resistance section and a comparative resistance section thermosensitive resistor having patterns and located between the support film and the protective film. The flat substrate has a recess which penetrates the flat substrate in the thickness direction thereof and facing the heating resistance section and the comparative resistance section. A fluid flow passage communicates with the recess which faces the comparative resistance section for fluid flow into the recess. Flow rate or velocity of a fluid can be measured accurately using the heating resistance section according to the fluid temperature reported by the comparative resistance section.
摘要:
A flow rate detecting element has a flat substrate 1 provided with a gap opening 18 on at least one side surface, a sensor section 15 including a heating resistance element 4 and a pair of temperature detecting resistance elements 5, 6 arranged on opposite sides of the heating resistance element and wrapped by an insulating supporting film 2 and an insulating protecting film 3 from above and below. The sensor section is arranged on a plane substantially parallel with a surface of the flat substrate and at least one end of the supporting film is held by the flat substrate to locate the sensor section over the gap, whereby the most part of the sensor section is disposed in a non-contact state with the flat substrate. A thin-film-shaped thermal conduction promoting member 11 is provided in a heat transmitting path of the sensor section between the heating resistance element and the pair of temperature detecting resistance elements, and has a higher thermal conductivity than the supporting film and the protecting film.
摘要:
A thermo-sensitive flow rate sensor includes a flow rate detecting device that has a plurality of flow rate detecting diaphragms, each of which is provided with heating portions and temperature detecting portions. The plurality of flow rate detecting diaphragms are arranged in a direction perpendicular to a direction of flow of a fluid to be measured. Each of the flow rate detecting diaphragms is formed and placed so that the length of a longer side thereof is two times the length of a shorter side or more, and that the longer side thereof extends along the direction of flow of the fluid to be measured. Each of the flow rate detecting diaphragms has at least one of the heating potions and at least one of the temperature detecting portions, which are arranged in the direction of flow of the fluid to be measured.
摘要:
A thermal-type flow sensor of high detection sensitivity and reliability in which a temperature measuring resistor is maintained at a predetermined temperature includes a plate-like substrate (1), a low heat capacity portion (13A) formed on a surface of the substrate (1), a heat generating resistor pattern (4) and a temperature measuring resistor (14) disposed on the low heat capacity portion (13A) and each formed of a heat-sensitive resistance film, and a control circuit (50) for applying a constant voltage (Vcc) to the temperature measuring resistor (14) while supplying a heating current (i) to the heat generating resistor pattern (4) for thereby outputting a flow-rate measurement signal derived on the basis of the heating current (i). The heat generating resistor pattern (4) and the temperature measuring resistor (14) are disposed essentially on a planar array along a direction in which a fluid destined for measurement flows. The temperature measuring resistor (14) is disposed internally of the heat generating resistor pattern (4) at a location upstream of a peak position of a temperature distribution making appearance in the flow direction of the fluid under the action of heat generated by the heat generating resistor pattern (4).
摘要:
A thermal-type flow sensor capable of generating a monotonously increasing output over a time period of transition from a reverse flow to a forward flow with a simplified structure while exhibiting high sensitivity in the measurement of flow rate in the forward direction. The flow sensor includes a plurality of heat generating portions implemented by upstream heat-sensitive resistor (4) and downstream heat-sensitive resistor (5) within a passage (19) as viewed in a direction in which fluid flows through the passage (19), for thereby measuring a flow rate or a flowing speed of the fluid on the basis of heat transfer phenomenon taking place between the heat generating portions and the fluid. The flow sensor includes a heating current control means (30, 31, 32) for controlling heating currents flowing through the heat-sensitive resistors (4, 5) so that temperatures of the plurality of heat generating portions increase by predetermined values relative to the temperature of the fluid, a means (34) for determining difference between heating currents flowing through the upstream heat generating portion and the downstream heat generating portion, and means (35 to 37) for detecting the flowing speed or the flow rate of the fluid on the basis of the difference between the heating currents.
摘要:
A clutch unit includes a lever-side clutch section provided on an input side, for controlling rotational torque to be input through lever operation, and a brake-side clutch section provided on an output side, for transmitting the rotational torque from the lever-side clutch section to the output side, and interrupting rotational torque to be reversely input from the output side. The brake-side clutch section has a two-layer structure, in which two one-way clutches are arranged side by side in an axial direction. The first one-way clutch interrupts rotational torque in a forward direction, which is reversely input from the output side, through meshing of serrated projection and depression portions, whereas the second one-way clutch interrupts rotational torque in a backward direction, which is reversely input from the output side, through meshing of serrated projection and depression portions arranged in an opposite direction.