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1.发明授权Measuring element for a mass air flow sensor and mass air flow sensor using the measuring element 失效使用测量元件的质量空气流量传感器和质量空气流量传感器的测量元件
公开(公告)号：US5708205A
公开(公告)日：1998-01-13
申请号：US649177
申请日：1996-05-17
摘要： A measuring element for a mass air flow sensor formed on a substrate for measuring a flow rate of an objective fluid comprises a pair of heated resistors of thin films juxtaposed in the flowing direction of the objective fluid, formed at a thin film heated resistor forming part on the substrate, a pair of non-heated ambient temperature sensing resistors of thin films, formed at a thin film ambient temperature sensing resistor forming part on the substrate, and a plurality of electrode terminals of thin films formed at a supporting part at which the substrate is supported, being a part excluding the heated resistor thin film forming part and the thin film ambient temperature sensing resistor forming part, for taking out electrical signals from the heated resisters and the non-heated ambient temperature sensing resistors, wherein the thin film heated resistor forming part and the thin film ambient temperature sensing resistor forming part are shifted each other and arranged before and after in the flowing direction of the fluid, and shifted and arranged left and right in the direction perpendicular to the flowing direction so that the pair of the heated resistors and the pair of the non-heated do not superimpose each other in the viewing direction parallel to the flowing direction, and the supporting part is allocated at one end side of the substrate, at which the plurality of electrode terminals of thin films are formed.
摘要翻译： 形成在用于测量物流的流量的基板上的质量空气流量传感器的测量元件包括一对加热的薄膜电阻，该薄膜并列在物流的流动方向上，形成在薄膜加热的电阻器形成部分 在衬底上，形成在薄膜环境温度感测电阻器上形成在衬底上的一部分薄膜的一对非加热环境温度感测电阻器，以及形成在支撑部分处的多个薄膜电极端子， 基板被支撑，除了加热的电阻器薄膜形成部分和薄膜环境温度感测电阻器形成部分之外的部分，用于从加热的电阻器和非加热的环境温度感测电阻器中取出电信号，其中薄膜被加热 电阻器形成部分和薄膜环境温度感测电阻器形成部分彼此相互偏移并且在之前和之后布置 并且沿垂直于流动方向的方向左右移动并布置，使得一对加热电阻器和一对未加热的电阻器在观察方向上不彼此叠置平行 并且支撑部分被分配在形成有多个薄膜电极端子的基板的一端侧。
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公开(公告)号：US06435023B1
公开(公告)日：2002-08-20
申请号：US08784077
申请日：1997-01-17
申请人： Chihiro Kobayashi , Masuo Akamatsu , Shinya Igarashi , Izumi Watanabe , Kaoru Uchiyama , Tadashi Isono
发明人： Chihiro Kobayashi , Masuo Akamatsu , Shinya Igarashi , Izumi Watanabe , Kaoru Uchiyama , Tadashi Isono
IPC分类号： G01F168
摘要： A heating resistor type air flow rate measuring apparatus is provided with a couple of heating resistors placed at the positions where those resistors may each interfere thermally with respect to an air flow, and a couple of driving circuits for driving those heating resistors. The air flow rate signal is obtained by calculating the difference between the output signals of a couple of heating resistors in terms of heat radiation rate effected by an air flow, and adding the difference value onto the output signal of one of the heating resistors.
摘要翻译： 一种加热电阻式空气流量测量装置设置有一对加热电阻器，放置在这些电阻器可能相对于气流热干扰的位置处，以及用于驱动这些加热电阻器的一对驱动电路。 空气流量信号是通过计算一对加热电阻器的输出信号之间的差异来获得的，该散热电阻器是由空气流量产生的热辐射率，并且将差值加到一个加热电阻器的输出信号上。
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公开(公告)号：US07036368B2
公开(公告)日：2006-05-02
申请号：US10634782
申请日：2003-08-06
IPC分类号： G01F1/68
摘要： A heating resistor type air flow rate measuring apparatus is provided with a couple of heating resistors placed at the positions where those resistors may each interfere thermally with respect to an air flow, and a couple of driving circuits for driving those heating resistors. The air flow rate signal is obtained by calculating the difference between the output signals of a couple of heating resistors in terms of heat radiation rate effected by an air flow, and adding the difference value onto the output signal of one of heating resistors.
摘要翻译： 一种加热电阻式空气流量测量装置设置有一对加热电阻器，放置在这些电阻器可能相对于气流热干扰的位置处，以及用于驱动这些加热电阻器的一对驱动电路。 空气流量信号是通过计算由气流产生的热辐射率的两个加热电阻器的输出信号之间的差值，并将差值加到一个加热电阻器的输出信号上而获得的。
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公开(公告)号：US5892150A
公开(公告)日：1999-04-06
申请号：US5830
申请日：1998-01-12
申请人： Tadashi Isono , Izumi Watanabe , Akira Takasago
发明人： Tadashi Isono , Izumi Watanabe , Akira Takasago
摘要： A measuring element for an air flow rate measuring apparatus has upstream and downstream heating resistors and first and second temperature compensating resistors paired with the upstream and downstream heating resistors, respectively. The resistors are mounted on an electrically insulated substrate positioned within an air flow. A substantial part of resistor film of the temperature compensating resistor paired with the upstream heating resistor is positioned upstream on the insulated substrate relative to the resistor film of the compensating resistor paired with the downstream heating resistor.
摘要翻译： 用于空气流量测量装置的测量元件具有分别具有与上游和下游加热电阻器配对的上游和下游加热电阻器和第一和第二温度补偿电阻器。 电阻器安装在位于空气流中的电绝缘基板上。 与上游加热电阻器成对的温度补偿电阻器的电阻膜的主要部分相对于与下游发热电阻器配对的补偿电阻器的电阻膜位于绝缘基板的上游。
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公开(公告)号：US5952571A
公开(公告)日：1999-09-14
申请号：US934758
申请日：1997-09-22
摘要： In a thermal type flow meter having a temperature compensating bridge circuit, the temperature compensating bridge circuit includes a heating resistor, a temperature compensating resistor and a plurality of resistors each having a fixed resistance. The heating resistor and the temperature compensating resistor are supported by a support member in an air flow passage, and the support member is formed by a material having a small temperature coefficient .DELTA..lambda. of thermal conductivity between -0.06 and 0.06 w/m.multidot.k.sup.2. The absolute value of the output error of the flow meter is reduced as a result of variation of the flow quantity or flow velocity of intake air and the intake air temperature.
摘要翻译： 在具有温度补偿桥接电路的热式流量计中，温度补偿电路电路包括加热电阻器，温度补偿电阻器和各自具有固定电阻的多个电阻器。 加热电阻器和温度补偿电阻器由空气流动通道中的支撑构件支撑，并且支撑构件由具有-0.06和0.06w / m×k2之间的热导率的温度系数DELTAλ的材料形成。 流量计的输出误差的绝对值由于进气量或进气温度的流量或流速的变化而降低。
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公开(公告)号：US08203102B2
公开(公告)日：2012-06-19
申请号：US12724399
申请日：2010-03-15
IPC分类号： H05B1/01
CPC分类号： G01F1/692 , G01F1/684 , G01F1/6845 , G01F1/698
摘要： A thermal type flow sensor measures a flow rate of a fluid by means of a heat resistive element having a temperature dependency. The sensor is comprised of: plural heat resistive elements used for a flow rate measurement; and a driver circuit for controlling a current applied to these heat resistive elements to cause their heating. The driver circuit is configured to sense a resistance change of a lower-temperature side heat resistive element among the plural heat resistive elements and to control the current to be applied to the plural heat resistive elements in accordance with a sensed value of the lower-resistance's variation.
摘要翻译： 热式流量传感器通过具有温度依赖性的耐热元件来测量流体的流量。 传感器包括：用于流量测量的多个热阻元件; 以及用于控制施加到这些热阻元件以引起其加热的电流的驱动器电路。 驱动电路被配置为感测多个耐热元件中的低温侧热电阻元件的电阻变化，并且根据下电阻元件的感测值来控制施加到多个耐热元件的电流 变异。
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公开(公告)号：US07631555B2
公开(公告)日：2009-12-15
申请号：US10580112
申请日：2003-11-20
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Izumi Watanabe , Keiji Hanzawa , Keiichi Nakada
IPC分类号： G01F1/68
CPC分类号： G01F1/6965 , G01F1/6845
摘要： A thermal air flowmeter having excellent temperature characteristics and improved measurement accuracy. The thermal air flowmeter includes a temperature sensor disposed in a casing of the air flowmeter, a computing unit for correcting a flow rate detection voltage from a measuring element by using the temperature sensor, and a heating temperature control disposed in a temperature control circuit for performing temperature control of a heating resistor to vary a temperature rise of the heating resistor relative to an air temperature depending on the air temperature. Flow rate detection errors of the thermal air flowmeter caused by an overall temperature change and a temperature change on an intake passage wall surface can be corrected simultaneously and a thermal air flowmeter having superior measurement accuracy can be realized.
摘要翻译： 具有优异的温度特性和改进的测量精度的热空气流量计。 热空气流量计包括设置在空气流量计的壳体中的温度传感器，用于使用温度传感器校正来自测量元件的流量检测电压的计算单元，以及设置在温度控制电路中的加热温度控制，用于执行 加热电阻器的温度控制以根据空气温度改变加热电阻器相对于空气温度的温度升高。 可以同时校正由总体温度变化和进气通道壁面上的温度变化引起的热空气流量计的流量检测误差，并且可以实现具有优异的测量精度的热空气流量计。
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公开(公告)号：US20060144138A1
公开(公告)日：2006-07-06
申请号：US10546174
申请日：2004-05-26
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/698
摘要： A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature ({Th=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.
摘要翻译： 一种以低成本制造并具有改进的可靠性的热流传感器。 在形成在半导体衬底（2）中的空腔（7）上，在腔的中心附近形成至少一个加热电阻（4），其中电绝缘膜置于加热电阻和空腔之间。 加热电阻（4）的温度（Th）通过恒温（{Th = Th-Ta））控制为高于介质温度（Ta）。 从加热电阻（4）的上游端到位于空腔上的电绝缘膜的上游端和恒温（DeltaTh）的气流方向的距离（Ws）满足以下关系： line-formula description =“In-line Formulas”end =“lead”？> DeltaTh / Ws <= 800（°C / mm）<？in-line-formula description =“In-line Formulas”end =“tail 因此，提供了能够防止由热诱导效应引起的诸如碳颗粒的漂浮微粒的沉积的热流量传感器，可以以低成本制造，并且具有高可靠性。
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公开(公告)号：US20060037390A1
公开(公告)日：2006-02-23
申请号：US11202017
申请日：2005-08-12
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F25/0007
摘要： A thermal type air flow meter that makes it possible to precisely and easily determine whether a sensor element is a non-defective or a defective by screening is provided. First and second diaphragm sections composed of an electrical insulating film are formed in a semiconductor substrate. A heating resistor and a resistor for intake air temperature sensor are disposed on them to obtain a sensor element for thermal type air flow meters. The length of the short sides W1 of the rectangular first diaphragm section is made substantially equal to the length of the short sides of the second diaphragm section rectangular as well. Thus, the pressures applied to each of the diaphragm sections are substantially identical with each other in pressurization during screening.
摘要翻译： 提供一种热式空气流量计，其能够精确且容易地确定传感器元件是否为缺陷或通过筛选的缺陷。 在半导体衬底中形成由电绝缘膜构成的第一和第二隔膜部分。 在其上设置加热电阻器和进气温度传感器用电阻器，以获得用于热式空气流量计的传感器元件。 矩形第一隔膜部分的短边W 1的长度也与第二隔膜部分的短边长度基本相等。 因此，施加到每个隔膜部分的压力在筛选期间的加压中基本相同。
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公开(公告)号：US06752014B1
公开(公告)日：2004-06-22
申请号：US09653168
申请日：2000-09-01
IPC分类号： G01F168
CPC分类号： G01F1/698 , G01F1/6845 , G01F1/696
摘要： A hot-wire type air flow meter for an internal combustion engine has an exothermic resistor film provided on a thin portion formed on a silicon substrate and a control circuit for controlling a voltage to be applied to the resistor film or a current to be supplied. The resistor film is arranged in a suction pipe of the internal combustion engine and heat is emitted to an air through the resistor film. In the case where a liquid droplet is deposited onto the resistor film, the control circuit controls the applied voltage to a value smaller than a voltage which is applied to the resistor film at the time of measuring a maximum specified measuring range or controls the supply current to a value smaller than a current flowing in the resistor film at the time of measuring the maximum specified measuring range.
摘要翻译： 用于内燃机的热线式空气流量计具有设置在形成在硅基板上的薄部分上的放热电阻膜和用于控制施加到电阻膜的电压或要供应的电流的控制电路。 电阻膜布置在内燃机的吸入管中，并且通过电阻膜将热量排放到空气中。 在液滴沉积到电阻膜上的情况下，控制电路将施加的电压控制为比测量最大规定测量范围时施加到电阻膜的电压小的值，或者控制电源电流 达到在测量最大规定测量范围时小于在电阻膜中流动的电流的值。
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