公开(公告)号：US20110042008A1

公开(公告)日：2011-02-24

申请号：US12735807

申请日：2009-02-20

申请人： Masaru Hori ,  Hiroyuki Kano ,  Kazuo Amano ,  Tetsuya Koike ,  Naofumi Yoshida ,  Toshiyuki Ikedo

发明人： Masaru Hori ,  Hiroyuki Kano ,  Kazuo Amano ,  Tetsuya Koike ,  Naofumi Yoshida ,  Toshiyuki Ikedo

IPC分类号： C23F1/08 ,  H05H1/48

CPC分类号： H05H1/48 ,  H01J37/3244 ,  H01J37/32449 ,  H01J37/32467 ,  H01J37/3255

摘要： To provide a plasma generator having a plasma-generating zone of an increased volume.A plasma generator 100 has a casing 10 made of a sintered ceramic produced from alumina (Al2O3) as a raw material. The casing 10 has a slit-like gas intake section 12, and a gas discharge section 20 in which a plurality of holes are disposed in a line. From the gas intake section 12 to the top of a plasma-generating zone P, the slits have a width of 1 mm. There is provided a second gas discharge section 22 including holes 24 which have a diameter of 0.5 mm and a length of 16 mm and which are arranged in a line along the longitudinal axis of the plasma-generating zone P. The plasma-generating zone P has a cross-section which is a rectangle having a side of 2 to 5 mm. Electrodes 2a, 2b are provided with hollow portions on the surfaces thereof facing each other. A power sources supplies about 9 kV, which is obtained by boosting 100 V (60 Hz) and is applied to the electrodes 2a, 2b with a current of 20 mA. When argon gas is supplied through a gas intake section 12, a plasma was generated, even when the electrodes 2a, 2b were separated at a maximum spacing of 4 cm. No electric discharge was generated between the tips of the holes 24 and a treatment object.

摘要翻译： 提供具有增加体积的等离子体产生区域的等离子体发生器。 等离子体发生器100具有由作为原料的氧化铝（Al 2 O 3）制成的烧结陶瓷制成的壳体10。 壳体10具有狭缝状的气体吸入部12和排列在多个孔中的气体排出部20。 从气体吸入部12到等离子体产生区P的顶部，狭缝的宽度为1mm。 设置有第二气体排出部22，该第二气体排出部22具有直径为0.5mm，长度为16mm的孔24，沿着等离子体产生区P的纵轴线排列。等离子体产生区P 具有侧面为2〜5mm的矩形的截面。 电极2a，2b在其彼此面对的表面上设置有中空部分。 电源提供约9kV，其通过升压100V（60Hz）而获得，并以20mA的电流施加到电极2a，2b。 当通过气体进入部分12供应氩气时，即使电极2a，2b以4cm的最大间距分离，也产生等离子体。 在孔24的尖端和处理对象物之间不产生放电。