公开(公告)号：US10962610B2

公开(公告)日：2021-03-30

申请号：US16260282

申请日：2019-01-29

Applicant: Massachusetts Institute of Technology

Inventor： Mohamed I Ibrahim ,  Christopher Foy ,  Donggyu Kim ,  Dirk Englund ,  Ruonan Han

IPC: G01R33/00 ,  G01R33/032 ,  G06N10/00 ,  G11C13/06 ,  G01R33/32 ,  G01R33/24 ,  G11C13/04 ,  H01L23/528 ,  H01L27/118 ,  G02B5/20 ,  H01L27/144

Abstract: The Zeeman shift of electronic spins in nitrogen-vacancy (NV) centers in diamond has been exploited in lab-scale instruments for ultra-high-resolution, vector-based magnetic sensing. A quantum magnetometer in CMOS utilizing a diamond-nanocrystal layer with NVs or NV-doped bulk diamond on a chip-integrated system provides vector-based magnetic sensing in a compact package. The system performs two functions for the quantum magnetometry: (1) strong generation and efficient delivery of microwave for quantum-state control and (2) optical filtering/detection of spin-dependent fluorescence for quantum-state readout. The microwave delivery can be accomplished with a loop inductor or array of wires integrated into the chip below the nanodiamond layer or diamond. And the wire array can also suppress excitation light using a combination of plasmonic and (optionally) Talbot effects.