公开(公告)号：US11054590B1

公开(公告)日：2021-07-06

申请号：US16734727

申请日：2020-01-06

Applicant: Massachusetts Institute of Technology

Inventor： Noel Wan ,  Jacques Johannes Carolan ,  Tsung-Ju Lu ,  Ian Robert Christen ,  Dirk Robert Englund

IPC: G02B6/42

Abstract: A process is provided for the high-yield heterogeneous integration of ‘quantum micro-chiplets’ (QMCs, diamond waveguide arrays containing highly coherent color centers) with an aluminum nitride (AlN) photonic integrated circuit (PIC). As an example, the process is useful for the development of a 72-channel defect-free array of germanium-vacancy (GeV) and silicon-vacancy (SiV) color centers in a PIC. Photoluminescence spectroscopy reveals long-term stable and narrow average optical linewidths of 54 MHz (146 MHz) for GeV (SiV) emitters, close to the lifetime-limited linewidth of 32 MHz (93 MHz). Additionally, inhomogeneities in the individual qubits can be compensated in situ with integrated tuning of the optical frequencies over 100 GHz. The ability to assemble large numbers of nearly indistinguishable artificial atoms into phase-stable PICs is useful for development of multiplexed quantum repeaters and general-purpose quantum computers.