公开(公告)号：US20220299170A1

公开(公告)日：2022-09-22

申请号：US17654952

申请日：2022-03-15

Applicant: Matheson Tri-Gas, Inc.

Inventor： Mark Raynor ,  Rikard Wind

IPC: F17C13/04 ,  F16K24/04 ,  F17C11/00 ,  B01J20/28 ,  B01J20/08 ,  B01J20/02 ,  B01J20/04 ,  B01J20/22 ,  B01J20/10 ,  B01J20/20 ,  B01J20/18

Abstract: The present invention relates to cylinder packages utilized in the delivery of highly toxic and/or flammable compounds to semiconductor manufacturers. More specifically, the present invention provides a cartridge adapted to removably attach to the gas outlet of a gas discharge passageway in a cylinder valve provided on a toxic gas containing cylinder package, the cartridge comprising a cylindrically shaped housing having at least one end fitted with a barrier member permeable to the toxic gas contained within the cylinder package and the housing containing a toxic-gas getter material.