公开(公告)号：US20230152668A1

公开(公告)日：2023-05-18

申请号：US18056673

申请日：2022-11-17

申请人： Mems DRIVE (NANJING) CO.,LTD.

发明人： Xiaolei Liu ,  Guigin Wang

IPC分类号： G03B13/36 ,  H02N2/02 ,  H02N2/00

CPC分类号： G03B13/36 ,  H02N2/028 ,  H02N2/22

摘要： A glass membrane deformation assembly configured to deform a glass membrane includes: a deformable glass membrane having a first surface and a second surface; a piezoelectric layer affixed to at least a portion of the first surface of the deformable glass membrane, wherein the piezoelectric layer is controllably deformable via a voltage potential; and a structural layer affixed to at least a portion of the second surface of the deformable glass membrane; wherein the controllably deformation of the piezoelectric layer is configured to controllably deform the deformable glass membrane.