OPTICAL COATING WITH LOW REFRACTIVE INDEX FILM DEPOSITION

    公开(公告)号:US20220389562A1

    公开(公告)日:2022-12-08

    申请号:US17827407

    申请日:2022-05-27

    IPC分类号: C23C14/10 G02B1/115 C23C14/24

    摘要: A method of forming a low reflectivity coating on an optical surface for wide angle of incidence is provided. The method includes depositing a low refractive index layer of material on a stack of dielectric layers, depositing a hydrophobic compatible material on the stack of dielectric layers, forming a blend interface layer on the stack of dielectric layers, the blend interface layer including a portion of the low refractive index layer of material and a portion of the hydrophobic compatible material, and depositing a hydrophobic layer of material adjacent to the blend interface layer. A physical vapor deposition chamber to perform the above method is also provided.