公开(公告)号：US20070116549A1

公开(公告)日：2007-05-24

申请号：US11554530

申请日：2006-10-30

申请人： Michael Rice ,  Nicholas Cravalho ,  Jeffrey Brodine

发明人： Michael Rice ,  Nicholas Cravalho ,  Jeffrey Brodine

IPC分类号： B66C23/00

CPC分类号： H01L21/67748 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68707

摘要： In one aspect, a first apparatus is provided that is adapted to transfer a substrate between a transfer chamber and a processing chamber. The first apparatus includes a robot having a first blade, a second blade spaced from the first blade, and a central hub coupled to the first blade by at least a first arm and coupled to the second blade by at least a second arm. The first blade and the second blade are spaced so as to allow (a) both blades to simultaneously extend through a slit valve that separates a transfer chamber from a processing chamber coupled to the transfer chamber when the robot is positioned within the transfer chamber; and (b) the first and second blades to transfer substrates to and remove substrates from the processing chamber without raising or lowering the first and second blades or the robot. Numerous other aspects are provided.

摘要翻译： 在一个方面，提供了适于在传送室和处理室之间传送衬底的第一设备。 第一装置包括具有第一叶片的机器人，与第一叶片间隔开的第二叶片，以及通过至少第一臂联接到第一叶片并通过至少第二臂联接到第二叶片的中心轮毂。 第一叶片和第二叶片间隔开以便（a）当机器人位于传送室内时，两个叶片同时延伸通过狭缝阀，该狭缝阀将传送室与耦合到传送室的处理室分离; 以及（b）第一和第二刀片，用于将基板转移到处理室中并从基板移除基板，而不会升高或降低第一和第二刀片或机器人。 提供了许多其他方面。

公开(公告)号：US07927062B2

公开(公告)日：2011-04-19

申请号：US11554530

申请日：2006-10-30

申请人： Michael Rice ,  Nicholas Cravalho ,  Jeffrey A. Brodine

发明人： Michael Rice ,  Nicholas Cravalho ,  Jeffrey A. Brodine

IPC分类号： G06F15/00

CPC分类号： H01L21/67748 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68707

摘要： In one aspect, a first apparatus is provided that is adapted to transfer a substrate between a transfer chamber and a processing chamber. The first apparatus includes a robot having a first blade, a second blade spaced from the first blade, and a central hub coupled to the first blade by at least a first arm and coupled to the second blade by at least a second arm. The first blade and the second blade are spaced so as to allow (a) both blades to simultaneously extend through a slit valve that separates a transfer chamber from a processing chamber coupled to the transfer chamber when the robot is positioned within the transfer chamber; and (b) the first and second blades to transfer substrates to and remove substrates from the processing chamber without raising or lowering the first and second blades or the robot. Numerous other aspects are provided.

摘要翻译： 在一个方面，提供了适于在传送室和处理室之间传送衬底的第一设备。 第一装置包括具有第一叶片的机器人，与第一叶片间隔开的第二叶片，以及通过至少第一臂联接到第一叶片并通过至少第二臂联接到第二叶片的中心轮毂。 第一叶片和第二叶片间隔开以便（a）当机器人位于传送室内时，两个叶片同时延伸通过狭缝阀，该狭缝阀将传送室与耦合到传送室的处理室分离; 以及（b）第一和第二刀片，用于将基板转移到处理室中并从基板移除基板，而不会升高或降低第一和第二刀片或机器人。 提供了许多其他方面。

公开(公告)号：US20130054005A1

公开(公告)日：2013-02-28

申请号：US13216394

申请日：2011-08-24

申请人： Rob Stevens ,  William J. Watt ,  Timothy Bragg ,  Nicholas Cravalho

发明人： Rob Stevens ,  William J. Watt ,  Timothy Bragg ,  Nicholas Cravalho

IPC分类号： G06F7/00

CPC分类号： G06Q10/087 ,  B65G1/1373

摘要： A method for managing an inventory system includes receiving an operation request that identifies an inventory item and selecting, from a plurality of workstations, a workstation at which to fulfill the operation request. The method also includes moving an inventory holder storing the identified inventory item to the selected workstation and moving a supply holder storing a supply item associated with the received operation request to the selected workstation. The method additionally includes fulfilling the operation request, at least in part, at the workstation.

摘要翻译： 一种用于管理库存系统的方法包括接收识别库存物品的操作请求，并从多个工作站中选择要在其上执行操作请求的工作站。 该方法还包括将存储所识别的库存物品的库存持有者移动到所选择的工作站，并将存储与所接收的操作请求相关联的供应品的供应架移动到所选择的工作站。 该方法还包括至少部分地在工作站处完成操作请求。

公开(公告)号：US08805574B2

公开(公告)日：2014-08-12

申请号：US13216394

申请日：2011-08-24

申请人： Rob Stevens ,  William J. Watt ,  Timothy Bragg ,  Nicholas Cravalho

发明人： Rob Stevens ,  William J. Watt ,  Timothy Bragg ,  Nicholas Cravalho

IPC分类号： G06F7/00

CPC分类号： G06Q10/087 ,  B65G1/1373

摘要： A method for managing an inventory system includes receiving an operation request that identifies an inventory item and selecting, from a plurality of workstations, a workstation at which to fulfill the operation request. The method also includes moving an inventory holder storing the identified inventory item to the selected workstation and moving a supply holder storing a supply item associated with the received operation request to the selected workstation. The method additionally includes fulfilling the operation request, at least in part, at the workstation.

摘要翻译： 一种用于管理库存系统的方法包括接收识别库存物品的操作请求，并从多个工作站中选择要在其上执行操作请求的工作站。 该方法还包括将存储所识别的库存物品的库存持有者移动到所选择的工作站，并将存储与所接收的操作请求相关联的供应品的供应架移动到所选择的工作站。 该方法还包括至少部分地在工作站处完成操作请求。