Photolithography on shrink film
    1.
    发明授权

    公开(公告)号:US09625819B2

    公开(公告)日:2017-04-18

    申请号:US13481653

    申请日:2012-05-25

    IPC分类号: G01B11/04 G03F7/20 G03F7/00

    摘要: Provided are methods of preparing a plurality of extrusions, comprising (a) shrinking a transparent first thermoplastic material comprising a plurality of non-transparent marks, (b) lithographically transferring the pattern of the shrunk non-transparent marks to a layer of photoresist deposited on a second thermoplastic material, and (c) shrinking the second thermoplastic material, thereby generating a plurality of extrusions on the shrunk second thermoplastic material.

    PHOTOLITHOGRAPHY ON SHRINK FILM
    2.
    发明申请
    PHOTOLITHOGRAPHY ON SHRINK FILM 有权
    闪光膜的光刻技术

    公开(公告)号:US20130101795A1

    公开(公告)日:2013-04-25

    申请号:US13481653

    申请日:2012-05-25

    IPC分类号: G03F7/20

    摘要: Provided are methods of preparing a plurality of extrusions, comprising (a) shrinking a transparent first thermoplastic material comprising a plurality of non-transparent marks, (b) lithographically transferring the pattern of the shrunk non-transparent marks to a layer of photoresist deposited on a second thermoplastic material, and (c) shrinking the second thermoplastic material, thereby generating a plurality of extrusions on the shrunk second thermoplastic material.

    摘要翻译: 提供了制备多个挤出物的方法,其包括(a)收缩包含多个不透明标记的透明第一热塑性材料,(b)将收缩的非透明标记的图案光刻转印到沉积在 第二热塑性材料,和(c)收缩第二热塑性材料,从而在收缩的第二热塑性材料上产生多个挤出物。