公开(公告)号：US20160027989A1

公开(公告)日：2016-01-28

申请号：US14339597

申请日：2014-07-24

Applicant: Mide Technology Corporation

Inventor： Christopher Ludlow ,  Jeffrey Richard Court ,  Cody John O'Sullivan ,  Stephen William Hanly ,  Brian Thomas Durant

IPC: H01L41/053 ,  H01L41/04 ,  H01L41/23 ,  H01L41/09

CPC classification number: H01L41/053 ,  F04D33/00 ,  H01L41/042 ,  H01L41/094 ,  H01L41/0973 ,  H01L41/23

Abstract: A method of making a piezoelectric fluid moving device, (e.g., a fan or synthetic jet actuator) includes forming at least a first electrode on a base substrate and disposing a spacer frame about the first electrode. A piezoelectric substrate is placed within the frame and over the first electrode. A cover substrate is located on the spacer frame. The cover substrate and spacer frame are laminated to each other and to the base substrate encapsulating the piezoelectric substrate between the cover substrate and the base substrate for a long life device.

Abstract translation: 制造压电流体移动装置（例如风扇或合成射流致动器）的方法包括在基底基板上形成至少第一电极并且在第一电极周围设置间隔框架。 压电基板被放置在框架内并且在第一电极上方。 覆盖基板位于间隔框架上。 覆盖基板和间隔框架彼此层压并且封装在覆盖基板和基板之间的压电基板的基底基板用于长寿命装置。