公开(公告)号：US20100031403A1

公开(公告)日：2010-02-04

申请号：US12376160

申请日：2006-08-11

申请人： Mirko Leuschner ,  Jens Struckmeier ,  Ulrich Geisler ,  Torsten Jahnke

发明人： Mirko Leuschner ,  Jens Struckmeier ,  Ulrich Geisler ,  Torsten Jahnke

IPC分类号： G01Q60/24

CPC分类号： G01Q30/10 ,  F28D15/0275 ,  F28F13/00 ,  F28F2013/008

摘要： The invention concerns a heat coupling device for scanning force or atomic force microscopy, comprising a first heat conducting device (27), a second heat conducting device (28) and a coupling device (36, 38, 39, 40, 41), in which the first heat conducting device (27) is movable relative to the second heat conducting device (28) and the coupling device (36, 38, 39, 40, 41) is arranged between the first and second heat conducting device (27, 28) and designed so that it is at least partially deformable fluid-like and/or flexible and the heat can be transferred between the first and second heat conducting device (28).

摘要翻译： 本发明涉及一种用于扫描力或原子力显微镜的热耦合装置，包括第一导热装置（27），第二导热装置（28）和联接装置（36,38,39,40,41），其中 所述第一导热装置（27）相对于所述第二导热装置（28）可移动，并且所述联接装置（36,38,39,40,41）布置在所述第一和第二导热装置（27,28）之间 ），并且被设计成使得其至少部分可变形地流体状和/或柔性，并且热量可以在第一和第二导热装置（28）之间传递。

公开(公告)号：US20050061970A1

公开(公告)日：2005-03-24

申请号：US10490442

申请日：2002-09-24

申请人： Detlef Knebel ,  Torsten Jahnke ,  Olaf Sunwoldt

发明人： Detlef Knebel ,  Torsten Jahnke ,  Olaf Sunwoldt

IPC分类号： G01B21/00 ,  G01B21/30 ,  G01Q20/02 ,  G01Q60/06 ,  G01N23/00

CPC分类号： G01Q20/02 ,  Y10S977/868

摘要： The invention concerns a device and a method for a scanning probe microscope, in particular, an atomic force scanning microscope. The invention is characterized in that it comprises a measuring device (100) including a lateral displacement mechanism (1) for displacing a measuring probe (5) in a plane, a vertical displacement mechanism (4) for displacing the measuring probe in a plane perpendicular to said plane, and sample-holder (11) for receiving a sample to be measured (6). An optical path (10) of the condenser is formed through the measuring device (100), so that the sample-holder (11) is arranged in the region of one end of the optical path (10) of the condenser.

摘要翻译： 本发明涉及扫描探针显微镜，特别是原子力扫描显微镜的装置和方法。 本发明的特征在于它包括一个测量装置（100），该测量装置（100）包括用于使一个测量探头（5）在一个平面内移位的横向位移机构（1），一个垂直位移机构（4） 和用于接收待测样品（6）的样品架（11）。 通过测量装置（100）形成冷凝器的光路（10），使得样品保持器（11）布置在冷凝器的光路（10）的一端的区域中。

公开(公告)号：US20060168703A1

公开(公告)日：2006-07-27

申请号：US11378258

申请日：2006-03-20

申请人： Detlef Knebel ,  Torsten Jahnke ,  Olaf Sunwoldt

发明人： Detlef Knebel ,  Torsten Jahnke ,  Olaf Sunwoldt

IPC分类号： G01N23/00

CPC分类号： G01Q20/02 ,  Y10S977/868

摘要： The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical shifting unit to displace the probe in a direction perpendicular to the plane, and a specimen support to receive a specimen. A condenser light path is formed through the measuring assembly so that the specimen support is located in the area of an end of the condenser light path.

公开(公告)号：US20100218284A1

公开(公告)日：2010-08-26

申请号：US12600289

申请日：2008-05-16

申请人： Torsten Jahnke

发明人： Torsten Jahnke

IPC分类号： G01Q20/00

CPC分类号： G01Q70/06

摘要： The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position. During the second measurement, in relation to the test sample, the measuring probe is held in the non-measurement position and the other measuring probe is held in the other measurement position, and the test sample is examined with the other measuring probe using a scanning probe microscope. The invention also relates to a measuring sensor system of a scanning probe microscope.

摘要翻译： 本发明涉及使用扫描探针显微镜检查测试样品的方法和装置。 根据该方法，使用测量探针系统在测试样品上进行使用扫描探针显微镜的第一和第二测量，其中测量探针和另一测量探针形成在公共测量探针插座上。 在第一次测量期间，相对于测试样本，测量探头保持在第一测量位置，另一个测量探头保持在另一个非测量位置，并使用扫描探头用测量探头检查测试样品 显微镜。 在第一次测量之后，通过相对于测试样本移位，测量探头从测量位置移动到非测量位置，而另一个测量探头从另一个非测量位置移动到另一个测量位置。 在第二次测量期间，相对于测试样品，测量探头保持在非测量位置，另一个测量探头保持在另一个测量位置，并用其他测量探头使用扫描检查测试样品 探针显微镜。 本发明还涉及扫描探针显微镜的测量传感器系统。

公开(公告)号：US20080308726A1

公开(公告)日：2008-12-18

申请号：US12160039

申请日：2006-12-21

申请人： Torsten Jahnke ,  Michael Richard Haggerty

发明人： Torsten Jahnke ,  Michael Richard Haggerty

IPC分类号： G01N23/00

CPC分类号： G01Q40/00 ,  G01Q30/06

摘要： The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a measurement sample using a scanning probe microscope and for optically examining said sample. In the method, an optical image of a measurement section of a measurement sample to be examined, said image being recorded with the aid of an optical recording device, is displayed on a display apparatus, a choice of a position in the optical image is detected, and, for a scanning probe measurement, a measurement probe which is configured for the scanning probe measurement is moved, using a movement apparatus which moves the measurement probe and the measurement sample relative to one another, to a measurement position, which is assigned to the selected position in the optical image in accordance with coordinate transformation, by virtue of the movement apparatus being controlled in accordance with the coordinate transformation, wherein a previously determined assignment between a coordinate system of the optical image and a coordinate system of a space covered by movement positions of the measurement probe and the measurement sample is formed with the coordinate transformation, wherein the movement positions comprise the measurement position.

摘要翻译： 本发明涉及一种用于操作含有扫描探针显微镜，特别是原子力显微镜的测量系统的方法，以及用于使用扫描探针显微镜检查测量样品并用于光学检查所述样品的测量系统。 在该方法中，在显示装置上显示要被检查的测量样本的测量部分的光学图像，所述图像通过光学记录装置被记录，并且检测光学图像中的位置的选择 并且对于扫描探针测量，使用将测量探针和测量样本相对于彼此移动的移动装置移动到被配置用于扫描探针测量的测量探针到测量位置，该测量位置被分配给 通过根据坐标变换来控制的移动装置，根据坐标变换在光学图像中选择的位置，其中预先确定的光学图像的坐标系和空间所覆盖的空间的坐标系之间的分配 测量探头和测量样品的运动位置用坐标变换形成，其中 运动位置包括测量位置。

公开(公告)号：US08368017B2

公开(公告)日：2013-02-05

申请号：US12160039

申请日：2006-12-21

申请人： Torsten Jahnke ,  Michael Richard Haggerty

发明人： Torsten Jahnke ,  Michael Richard Haggerty

IPC分类号： G01N23/00

CPC分类号： G01Q40/00 ,  G01Q30/06

摘要： The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a measurement sample using a scanning probe microscope and for optically examining said sample. In the method, an optical image of a measurement section of a measurement sample to be examined, said image being recorded with the aid of an optical recording device, is displayed on a display apparatus, a choice of a position in the optical image is detected, and, for a scanning probe measurement, a measurement probe which is configured for the scanning probe measurement is moved, using a movement apparatus which moves the measurement probe and the measurement sample relative to one another, to a measurement position, which is assigned to the selected position in the optical image in accordance with coordinate transformation, by virtue of the movement apparatus being controlled in accordance with the coordinate transformation, wherein a previously determined assignment between a coordinate system of the optical image and a coordinate system of a space covered by movement positions of the measurement probe and the measurement sample is formed with the coordinate transformation, wherein the movement positions comprise the measurement position.

摘要翻译： 本发明涉及一种用于操作含有扫描探针显微镜，特别是原子力显微镜的测量系统的方法，以及用于使用扫描探针显微镜检查测量样品并用于光学检查所述样品的测量系统。 在该方法中，在显示装置上显示要被检查的测量样本的测量部分的光学图像，所述图像通过光学记录装置被记录，检测光学图像中的位置的选择 并且对于扫描探针测量，使用将测量探针和测量样本相对于彼此移动的移动装置移动到被配置用于扫描探针测量的测量探针到测量位置，该测量位置被分配给 通过根据坐标变换来控制的移动装置，根据坐标变换在光学图像中选择的位置，其中预先确定的光学图像的坐标系和空间所覆盖的空间的坐标系之间的分配 测量探头和测量样品的运动位置用坐标变换形成，其中 运动位置包括测量位置。

公开(公告)号：US20090140685A1

公开(公告)日：2009-06-04

申请号：US11992850

申请日：2006-09-29

申请人： Detlef Knebel ,  Torsten Jahnke

发明人： Detlef Knebel ,  Torsten Jahnke

IPC分类号： G05G5/14 ,  G05G5/04

CPC分类号： G01Q70/04 ,  G01N35/04 ,  G01N2035/0491 ,  G01Q10/04

摘要： The invention relates to a method and a device for the positioning of a displaceable component in an examining system, particularly a measuring or an analytic system wherein, during the process, the displaceable component is displaced with the support of an actuating element coupled to the displaceable component from a home position into an end position, wherein the actuating element is moved by means of a drive force and the displaceable component is impacted with a fixation force fixating the displaceable component in the end position by way of a fixation component connected to the displaceable component, where the fixation component is submerged at least partially in a reservoir of a medium and is fixated in the medium by means of the transformation of the medium from a liquid state into a solidified state, wherein the medium is transformed from the liquid state into the solidified state by means of the impact-application with a manipulating variable.

摘要翻译： 本发明涉及一种用于在检查系统中定位可移动部件的方法和装置，特别是测量系统或分析系统，其中在该过程期间，可移位部件与致动元件的支撑件相接触， 组件从原始位置到终端位置，其中致动元件通过驱动力移动，并且可移动部件用固定力冲击，固定力通过连接到可移位的固定部件固定到终止位置 组分，其中固定组分至少部分地浸没在介质的储存器中，并且通过介质从液态转化为固化状态而固定在介质中，其中介质从液态转变成 通过具有操纵变量的冲击应用的固化状态。