公开(公告)号：US5539855A

公开(公告)日：1996-07-23

申请号：US197784

申请日：1994-02-16

申请人： Mitsukazu Takahashi ,  Takatoshi Chiba ,  Katsuichi Akiyoshi

发明人： Mitsukazu Takahashi ,  Takatoshi Chiba ,  Katsuichi Akiyoshi

IPC分类号： G01K7/00 ,  G01K1/16 ,  H01L21/324 ,  H01L21/66 ,  H05B3/00 ,  A21B2/00 ,  F26B19/00

CPC分类号： G01K1/16

摘要： A substrate temperature measuring apparatus includes a temperature signal generating device provided in contact with a substrate for generating a signal indicating its own temperature which follows the temperature of the substrate by thermal conduction, a device connected and responsive to the output of the temperature signal generating device for determining whether contact between the substrate and the temperature signal generating device is appropriate or not, and a device for carrying out a predetermined process according to a determination result of the determining device. It is possible to apply heat treatment to the substrate, to prevent the substrate from being subjected to heat treatment, or to give a necessary alarm according to the determination result. Since the next substrate is at room temperature when it first comes into contact with the temperature signal generating device after heat treatment, the temperature signal generating device lowers its temperature rapidly in such a manner that reflects a state of contact between the substrate and the temperature signal generating device. Based on change of the output of the temperature signal generating device at this time, it is possible to detect an undesired state of contact between the substrate and the temperature signal generating device, and to prevent inaccurate measurement of the temperature of the substrate.

摘要翻译： 基板温度测量装置包括：温度信号发生装置，与温度信号发生装置接触，用于通过热传导产生表示其本身温度跟随基板温度的信号;连接的装置，并响应温度信号发生装置的输出 用于确定基板和温度信号发生装置之间的接触是否适当;以及根据确定装置的确定结果执行预定处理的装置。 可以对基板进行热处理，以防止基板受到热处理，或者根据确定结果进行必要的报警。 由于下一个基板在热处理后首先与温度信号发生装置接触时处于室温，所以温度信号发生装置以反映基板和温度信号之间的接触状态的方式快速降低其温度 生成装置。 基于此时的温度信号发生装置的输出变化，可以检测基板和温度信号发生装置之间的不期望的接触状态，并且防止基板的温度的不准确的测量。