公开(公告)号：US4672185A

公开(公告)日：1987-06-09

申请号：US802374

申请日：1985-11-27

申请人： Mitsuo Sato ,  Hiroshi Kamidoi

发明人： Mitsuo Sato ,  Hiroshi Kamidoi

IPC分类号： H01L21/02 ,  G06K7/10 ,  H01L21/00

CPC分类号： H01L21/67294 ,  G06K7/10861

摘要： A control system for a semiconductor substrate process line comprises a process line having processing units for processing a semiconductor wafer in accordance with preset data, a plurality of cassettes each for storing a plurality of semiconductor wafers and having an identification member on a surface thereof consisting of a plurality of projections arranged in a row, a non-contact type number reader provided at an entrance side of the processing unit for reading the cassette number designated by the identification member and generating a signal corresponding to the number, and a control unit in which processing conditions are input corresponding to the semiconductor wafers stored in the cassettes and which identifies the signal from the reader and controls the processing unit under processing conditions corresponding to the identified number.

摘要翻译： 一种用于半导体衬底工艺线的控制系统包括具有根据预设数据处理半导体晶片的处理单元的处理线，多个用于存储多个半导体晶片并在其表面上具有识别元件的盒， 设置在行中的多个突起，设置在处理单元的入口侧的非接触型数字读取器，用于读取由识别构件指定的盒式磁带号，并产生与该数相对应的信号;以及控制单元，其中 对应于存储在盒中的半导体晶片输入处理条件，并且识别来自读取器的信号，并在对应于所识别的数字的处理条件下控制处理单元。

公开(公告)号：USD514074S1

公开(公告)日：2006-01-31

申请号：US29200288

申请日：2004-02-27

申请人： Hiroshi Kamidoi ,  Toshiya Ishihara

设计人： Hiroshi Kamidoi ,  Toshiya Ishihara