公开(公告)号：US06416912B1

公开(公告)日：2002-07-09

申请号：US09699154

申请日：2000-10-27

申请人： Mitsuru Kobayashi ,  Ryoichi Kaneko

发明人： Mitsuru Kobayashi ,  Ryoichi Kaneko

IPC分类号： G03F900

CPC分类号： G03F9/7084 ,  G03F9/7076

摘要： An exposure apparatus for accurately and quickly transferring mask patterns to a substrate on which a plurality of pattern layers are formed, and a method of manufacturing microdevices that uses the exposure apparatus. A wafer mark (or substitute wafer mark ) of a gate electrode layer and a wafer mark of a second interlayer insulating layer are formed on a street line of a wafer. Mark bars WMnm (n=1, 2, M−1 to 4) of the wafer marks are alternately arranged, and combined marks are formed. The combined marks are simultaneously detected with an alignment system, and positional information of the wafer marks is computed based on the detection results. Then, the circuit patterns on a reticle are aligned with a shot region on the wafer based on the computed positional information.

摘要翻译： 一种用于将掩模图形准确且快速地转印到其上形成有多个图案层的基板上的曝光装置，以及使用该曝光装置的微型装置的制造方法。 在晶片的街道线上形成栅电极层的晶片标记（或替代晶片标记）和第二层间绝缘层的晶片标记。 标记条交替排列晶片标记的WMnm（n = 1,2，M-1至4），形成组合标记。 利用对准系统同时检测组合标记，并根据检测结果计算晶片标记的位置信息。 然后，基于所计算的位置信息，将掩模版上的电路图案与晶片上的照射区域对齐。

公开(公告)号：US06533311B2

公开(公告)日：2003-03-18

申请号：US09893594

申请日：2001-06-29

申请人： Ryoichi Kaneko ,  Tokihiko Ikuno ,  Toshiro Yoshie

发明人： Ryoichi Kaneko ,  Tokihiko Ikuno ,  Toshiro Yoshie

IPC分类号： B62B706

CPC分类号： B62B7/06 ,  B62B7/062 ,  B62B7/086 ,  B62B2205/22

摘要： A baby carriage includes a pair of front legs 12, 12 each having a front wheel 11 at its lower end of the leg 12, a pair of rear legs 14, 14 each having a rear wheel 13 at its lower end of the leg 14, a pair of side connecting rods 23, 23 each having one end rotatably connected to a middle part of the front leg 12 and the other end rotatably connected to a middle part of the rear leg 14, a pair of handle pipes 18, 18 having their middle parts rotatably connected to upper parts of the rear legs 14, 14 respectively and a pair of locking mechanisms 25, 25 connecting respective lower ends of the handle pipes 18, 18 with upper ends of the front legs 12, 12 respectively. Each of the locking mechanisms 25, 25 is adapted so as to be in a fixing state where the handle pipe 18 is fixed with respect to the front leg 12 substantially along an extending direction of the front leg 12 and also in a folding state where the handle pipe 18 is folded close to the front leg 12, allowing a number of constituents and a height of the baby carriage to be reduced together.

公开(公告)号：US5911842A

公开(公告)日：1999-06-15

申请号：US841676

申请日：1997-04-30

申请人： Masao Shiga ,  Kishio Hidaka ,  Norio Yamada ,  Shigeyoshi Nakamura ,  Yutaka Fukui ,  Nobuo Shimizu ,  Ryoichi Kaneko ,  Yasuhiro Harada ,  Yasuo Watanabe ,  Toshio Fujita ,  Norio Morisada ,  Yasuhiko Tanaka

发明人： Masao Shiga ,  Kishio Hidaka ,  Norio Yamada ,  Shigeyoshi Nakamura ,  Yutaka Fukui ,  Nobuo Shimizu ,  Ryoichi Kaneko ,  Yasuhiro Harada ,  Yasuo Watanabe ,  Toshio Fujita ,  Norio Morisada ,  Yasuhiko Tanaka

IPC分类号： F01D5/02 ,  C21D9/28 ,  C21D9/38 ,  C22C38/00 ,  C22C38/22 ,  C22C38/24 ,  C22C38/26 ,  C22C38/30 ,  C22C38/32 ,  C22C38/54 ,  F01D5/06 ,  C21D8/10 ,  C21D9/30

CPC分类号： C22C38/32 ,  C21D9/28 ,  C22C38/001 ,  C22C38/22 ,  C22C38/24 ,  C22C38/26 ,  C22C38/30 ,  C21D2211/008

摘要： A heat resisting steel whose metal structure is entirely martensite phase produced by tempering after quenching. The steel comprises, by weight, 0.05 to 0.20% C, not more than 0.15% Si, not more than 1.5% Mn, not more than 1.0% Ni, 8.5 to 13.0% Cr, not more than 3.50% Mo, not more than 3.5% W, 0.05 to 0.30% V, 0.01 to 0.20% Nb, not more than 5.0% Co, 0.001 to 0.020% boron, 0.005 to 0.040% nitrogen, 0.0005 to 0.0050% oxygen and 0.00001 to 0.0002% hydrogen. The steel has preferably not more than 10 of the Cr equivalent. The steel has 10 kgf/mm.sup.2 or more of 100,000 hours creep rupture strength at 650.degree. C.

摘要翻译： 淬火后通过回火生产金属结构完全是马氏体相的耐热钢。 该钢包含0.05〜0.20％的C，不大于0.15％的Si，不超过1.5％的Mn，不超过1.0％的Ni，8.5〜13.0％的Cr，不大于3.50％的Mo，不大于 3.5％W，0.05〜0.30％V，0.01〜0.20％Nb，5.0％以下的Co，0.001〜0.020％的硼，0.005〜0.040％的氮，0.0005〜0.0050％的氧和0.00001〜0.0002％的氢。 钢优选不超过10当量的Cr当量。 该钢在650℃下具有10kgf / mm 2以上的100,000小时蠕变断裂强度

公开(公告)号：USD356270S

公开(公告)日：1995-03-14

申请号：US9850

申请日：1993-06-23

申请人： Ryoichi Kaneko

设计人： Ryoichi Kaneko

公开(公告)号：USD353550S

公开(公告)日：1994-12-20

申请号：US907436

申请日：1992-07-01

申请人： Ryoichi Kaneko

设计人： Ryoichi Kaneko

公开(公告)号：USD346565S

公开(公告)日：1994-05-03

申请号：US709134

申请日：1991-05-31

申请人： Ryoichi Kaneko

设计人： Ryoichi Kaneko

公开(公告)号：USD346564S

公开(公告)日：1994-05-03

申请号：US709131

申请日：1991-05-31

申请人： Ryoichi Kaneko

设计人： Ryoichi Kaneko

公开(公告)号：USD345940S

公开(公告)日：1994-04-12

申请号：US809415

申请日：1991-12-18

申请人： Ryoichi Kaneko

设计人： Ryoichi Kaneko

公开(公告)号：USD345935S

公开(公告)日：1994-04-12

申请号：US709140

申请日：1991-05-31

申请人： Ryoichi Kaneko

设计人： Ryoichi Kaneko

公开(公告)号：USD345321S

公开(公告)日：1994-03-22

申请号：US709141

申请日：1991-05-31

申请人： Ryoichi Kaneko

设计人： Ryoichi Kaneko