公开(公告)号：US11298856B2

公开(公告)日：2022-04-12

申请号：US15922499

申请日：2018-03-15

Applicant: Molecular Imprints, Inc.

Inventor： Chieh Chang ,  Christophe Peroz ,  Roy Matthew Patterson ,  Matthew S. Shafran ,  Christopher John Fleckenstein ,  Charles Scott Carden

IPC: B29C43/58 ,  B29C35/08 ,  G02B1/04 ,  B29C33/10 ,  B29C43/54 ,  G03F7/00 ,  B29L11/00 ,  B29C37/00 ,  B29C43/56

Abstract: An example system is configured to photocure a photocurable material to form a polymer film. The system includes a first chuck configured to support a first substantially planar mold, a second chuck configured to support a second substantially planar mold, and an actuable stage coupled to the first chuck and/or the second chuck. The actuable stage is configured to position the first chuck and/or the second chuck so that the first and second molds are separated by a gap. The system also includes a sensor arrangement for obtaining measurement information indicative of a distance between the first and second molds and/or a pressure between the first and second chucks at each of at least three locations. The system also includes a control module configured control the gap between the first and second molds based on the measurement information.

公开(公告)号：US20180264691A1

公开(公告)日：2018-09-20

申请号：US15922499

申请日：2018-03-15

Applicant: Molecular Imprints, Inc.

Inventor： Chieh Chang ,  Christophe Peroz ,  Roy Matthew Patterson ,  Matthew S. Shafran ,  Christopher John Fleckenstein ,  Charles Scott Carden

IPC: B29C43/58 ,  B29C35/08 ,  B29C43/56 ,  G02B1/04

Abstract: An example system is configured to photocure a photocurable material to form a polymer film. The system includes a first chuck configured to support a first substantially planar mold, a second chuck configured to support a second substantially planar mold, and an actuable stage coupled to the first chuck and/or the second chuck. The actuable stage is configured to position the first chuck and/or the second chuck so that the first and second molds are separated by a gap. The system also includes a sensor arrangement for obtaining measurement information indicative of a distance between the first and second molds and/or a pressure between the first and second chucks at each of at least three locations. The system also includes a control module configured control the gap between the first and second molds based on the measurement information.