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公开(公告)号:US10687393B2
公开(公告)日:2020-06-16
申请号:US15317286
申请日:2015-06-12
发明人: Zhong-Hao Lu , Tomoo Hasegawa , Yoshihiko Matsui , Yuji Morikawa
摘要: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.
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公开(公告)号:US20170127476A1
公开(公告)日:2017-05-04
申请号:US15317286
申请日:2015-06-12
发明人: Zhong-Hao Lu , Tomoo Hasegawa , Yoshihiko Matsui , Yuji Morikawa
摘要: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.
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