公开(公告)号：US20170127476A1

公开(公告)日：2017-05-04

申请号：US15317286

申请日：2015-06-12

Applicant: Momentive Performance Materials Inc.

Inventor： Zhong-Hao Lu ,  Tomoo Hasegawa ,  Yoshihiko Matsui ,  Yuji Morikawa

IPC: H05B3/14 ,  H05B3/06 ,  H01C17/00 ,  H05B3/42

Abstract: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.

公开(公告)号：US10934633B2

公开(公告)日：2021-03-02

申请号：US15119143

申请日：2015-02-20

Applicant: Momentive Performance Materials Inc.

Inventor： Zhong-Hao Lu ,  Rohit Arun Bhosale ,  Jacqueline M. More ,  Sudarshan Natarajan ,  Joseph Patrick Reyes

IPC: H05B3/26 ,  C30B11/00 ,  H05B3/12 ,  C30B11/02 ,  C30B29/42

Abstract: A heater comprises a plurality of zones with at least two zones having a variable power density gradient different from one another. The heater having zones of different variable power density gradients allows for controlling the heat output and temperature profile of the heater in one or more directions of the heater. The heater can be used, for example, to control the temperature profile in a vertical direction.

公开(公告)号：US20170273145A1

公开(公告)日：2017-09-21

申请号：US15074286

申请日：2016-03-18

Applicant: Momentive Performance Materials Inc.

Inventor： Zhong-Hao Lu

IPC: H05B3/48 ,  H05B3/14 ,  H05B3/00

CPC classification number: H05B3/48 ,  H05B3/0014 ,  H05B3/145 ,  H05B3/42 ,  H05B2203/004 ,  H05B2203/005 ,  H05B2203/017 ,  H05B2203/037

Abstract: A heater assembly is disclosed herein. The heater assembly may comprise a tubular body. The tubular body may include a graphite core disposed in a heating path. The graphite core may be coated with an overcoat layer. The tubular body may include slits that may cut-off heat transfer between portions of the tubular body. The heater assembly may have a configuration comprising a plurality of heating rungs having a predominant portion disposed substantially perpendicular to an upper surface of the heater so that the predominant portion is disposed vertically. The heater assembly may include a flange at a first end and a lip at a second end. The heater assembly configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to other designs.

公开(公告)号：US10687393B2

公开(公告)日：2020-06-16

申请号：US15317286

申请日：2015-06-12

Applicant: Momentive Performance Materials Inc.

Inventor： Zhong-Hao Lu ,  Tomoo Hasegawa ,  Yoshihiko Matsui ,  Yuji Morikawa

IPC: H05B3/20 ,  H05B3/28 ,  H05B3/14 ,  H05B3/06 ,  H05B3/62 ,  H05B3/24 ,  H01C17/00 ,  H05B3/42

Abstract: A coated graphite heater. The heater has a configuration comprising a plurality of heating elements having a major portion disposed parallel to an upper surface of the heater so that the major portion is disposed horizontally. The heater configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to designs having heating elements with a major portion oriented perpendicular to the plane of the upper surface of the heater.

公开(公告)号：US10237921B2

公开(公告)日：2019-03-19

申请号：US15074286

申请日：2016-03-18

Applicant: Momentive Performance Materials Inc.

Inventor： Zhong-Hao Lu

IPC: H05B3/48 ,  H05B3/00 ,  H05B3/14 ,  H05B3/42

Abstract: A heater assembly is disclosed herein. The heater assembly may comprise a tubular body. The tubular body may include a graphite core disposed in a heating path. The graphite core may be coated with an overcoat layer. The tubular body may include slits that may cut-off heat transfer between portions of the tubular body. The heater assembly may have a configuration comprising a plurality of heating rungs having a predominant portion disposed substantially perpendicular to an upper surface of the heater so that the predominant portion is disposed vertically. The heater assembly may include a flange at a first end and a lip at a second end. The heater assembly configuration provides a heater that exhibits reduced thermal stress and/or reduced CTE mismatch stress particularly compared to other designs.

公开(公告)号：US20180096867A1

公开(公告)日：2018-04-05

申请号：US15281605

申请日：2016-09-30

Applicant: Momentive Performance Materials Inc.

Inventor： Zhong-Hao Lu

IPC: H01L21/67 ,  B23P15/26

CPC classification number: H01L21/67103 ,  B23P15/26 ,  H01L21/67109 ,  H05B1/0233

Abstract: A heater assembly is provided having a configuration to promote more uniform heating and temperature distribution to the heating surface. A heater assembly as disclosed herein comprises a bottom plate comprising a heating element and a top plate having an upper surface for heating a substrate and a lower surface that contacts the bottom plate. The upper plate is provide such that the lower surface has a surface topography such that the contact points between the upper plate and the lower plate.