公开(公告)号：US20080228435A1

公开(公告)日：2008-09-18

申请号：US12039479

申请日：2008-02-28

申请人： Moon-Sang LEE ,  Bong-Jin YUM ,  Hong-Seok KIM ,  Kwan-Woo KIM ,  Seung-Hyun KIM ,  Chan-Hoon PARK

发明人： Moon-Sang LEE ,  Bong-Jin YUM ,  Hong-Seok KIM ,  Kwan-Woo KIM ,  Seung-Hyun KIM ,  Chan-Hoon PARK

IPC分类号： G06F11/00

CPC分类号： G03F7/70633 ,  G03F7/705 ,  G03F7/70508

摘要： A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods. And, when erroneous data is detected, or when measured data is missing, a robust regression analysis method and a technique for filtering the erroneous data and the missing data are used.

摘要翻译： 考虑到根据高阶回归分析模型的覆盖测量误差，测量系统和测量方法可以获得接近真实值的测量值。 测量系统和测量方法提供了一种用于使用最佳实验设计确定要测量的拍摄的最佳位置的技术。 当回归分析模型和要测量的拍摄数量预先确定时，使用一种方法根据回归分析模型和使用置信区间估计方法的处理色散来确定要测量的最佳拍摄张数。 动态采样方法用于通过组合上述两种方法，根据过程特征的变化动态地改变要测量的拍摄张数和位置。 并且，当检测到错误数据时，或者当测量数据丢失时，使用鲁棒的回归分析方法和用于过滤错误数据和丢失数据的技术。