公开(公告)号：US20070018082A1

公开(公告)日：2007-01-25

申请号：US10563626

申请日：2004-07-08

申请人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Matsato Takada

发明人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Matsato Takada

IPC分类号： G01B9/10 ,  G02B6/00

CPC分类号： G01Q60/22 ,  G01N21/55 ,  G02B21/002

摘要： The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.

摘要翻译： 利用普通传播光的宽范围测量和利用近场光的高分辨率测量模式将通过唯一的组装的光学探针来实现。 为此，通过具有形成为限定发光孔径D的光屏蔽被覆层33的光学探头13照射的光或者在光学探针13的芯31处照射的光被传播，因为光学探针13被移动到 朝向和远离用于测量的表面2a的方向。 光探头的芯部涂覆有遮光涂层33.以这种方式，通过芯31传播的传播光斑或从光辐射孔D渗透的近场光斑被形成在表面上 用于测量2a，并且检测从光斑导出的光。