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公开(公告)号：US20220093358A1
公开(公告)日：2022-03-24
申请号：US17408930
申请日：2021-08-23
Applicant: Moxtek, Inc.
Inventor： Eric Miller , Mike Ossofsky
Abstract: An x-ray source can have increased x-ray flux and can simultaneously provide characteristic peaks and from multiple, different chemical elements. The target can include multiple layers of different chemical compositions. These layers can be distinguished by a higher atomic number, a higher energy K-alpha x-ray characteristic line, and a higher density in one layer compared to another layer. The layer that is lower in these characteristics can face the x-ray window. The layers can be formed by sputter deposition.
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