公开(公告)号：US20240410744A1

公开(公告)日：2024-12-12

申请号：US18810850

申请日：2024-08-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shozo OTERA ,  Yutaka ISHIURA ,  Jun ENDO ,  Michio WADA

IPC: G01H11/08

Abstract: A vibration device that includes a support member, an actuator, and a sensor that detects a force applied to a vibrated member and displacement of the vibrated member in a left-right direction. The support member includes a fixing portion, a vibration portion, and an elastically deformable portion connecting the fixing portion and the vibration portion. The actuator is attached to the fixing portion and the vibration portion. The sensor is attached to the elastically deformable portion. The elastically deformable portion has a first elastic modulus in the left-right direction, a second elastic modulus in a front-rear direction, and a third elastic modulus in an up-down direction. The first elastic modulus is smaller than the second elastic modulus. The third elastic modulus is smaller than the second elastic modulus.