公开(公告)号：US20170069821A1

公开(公告)日：2017-03-09

申请号：US15355369

申请日：2016-11-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： TAKAO MOURI ,  Kansho Yamamoto

IPC: H01L41/047 ,  H01L41/18 ,  H01L41/113 ,  H01L41/09

Abstract: A piezoelectric device that includes a substrate defining an opening therein; a piezoelectric layer arranged above the substrate such that at least part of the piezoelectric layer extends over the opening and forms a membrane part that is not superimposed with the substrate; a lower electrode arranged below the piezoelectric layer in at least the membrane part; and an upper electrode that is arranged above the piezoelectric layer so as to face at least part of the lower electrode with the piezoelectric layer interposed therebetween in the membrane part. A heater is arranged above the piezoelectric layer so as to be separate from the upper electrode or at least part of the upper electrode doubles as a heater.

Abstract translation: 一种包括在其中限定开口的基板的压电装置; 压电层，其布置在所述基板上方，使得所述压电层的至少一部分在所述开口上延伸并形成不与所述基板叠置的膜部分; 在至少所述膜部分中布置在所述压电层下方的下电极; 以及上部电极，其布置在所述压电层的上方，以便在所述膜部分中与所述压电层插入所述下部电极的至少一部分。 在压电体层的上方配置有加热器，与上部电极分离，或者上部电极的至少一部分加热。