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公开(公告)号:US3896308A
公开(公告)日:1975-07-22
申请号:US43129674
申请日:1974-01-07
Applicant: NAT RES DEV
Inventor: VENABLES JOHN ANTHONY , POLLARD PETER JOHN , GRIFFITHS BARRIE WILLIAM
IPC: H01J37/244 , H01J37/26
CPC classification number: H01J37/244 , H01J2237/24435 , H01J2237/24475 , H01J2237/2448 , H01J2237/24507
Abstract: The invention concerns a detector for electron microscopes. The detector is capable of detecting both secondary and reflected primary electrons and can be used either in the reflection or transmission mode. It essentially consists of a channel plate electron multiplier mounted between two electrodes across which a potential can be applied and one or more detector electrodes arranged to receive electrons transmitted through the channel plate.