公开(公告)号：US20150343567A1

公开(公告)日：2015-12-03

申请号：US14289777

申请日：2014-05-29

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Chih WANG ,  Chi-Haw CHIANG ,  Chih-Wei LUO ,  Sheng-Yang TSENG ,  Ya-Hsin TSENG ,  Hui-Hsin CHU

IPC: B23K26/40 ,  B23K26/06 ,  B23K26/38

CPC classification number: B23K26/0624 ,  B23K26/382 ,  B23K2103/50 ,  B23K2103/52

Abstract: A method and system for formation of vertical microvias in an opaque ceramic thin-plate by femtosecond laser pulses are introduced. The method includes (a) thin an opaque ceramic substrate and reduce its thickness to a range of 20-100 μm to provide the ceramic thin-plate; (b) place the ceramic thin-plate on a carrier; and (c) drill the ceramic thin-plate by the femtosecond laser pulses, wherein the femtosecond laser pulses have the following parameters, including a pulse width

Abstract translation: 介绍了通过飞秒激光脉冲在不透明陶瓷薄板中形成垂直微孔的方法和系统。 该方法包括（a）使不透明的陶瓷基板变薄，并将其厚度减小到20-100μm的范围以提供陶瓷薄板; （b）将陶瓷薄板放在载体上; 和（c）通过飞秒激光脉冲钻陶瓷薄板，其中飞秒激光脉冲具有以下参数，包括脉冲宽度<100fs，脉冲频率为1,000〜10,000Hz，中心波长为 800nm，速度为20-200μm/ s的可动台。 因此，可以在不透明陶瓷薄板中制造具有高纵横比的垂直微凹。